Matches in SemOpenAlex for { <https://semopenalex.org/work/W1995576169> ?p ?o ?g. }
- W1995576169 endingPage "1753" @default.
- W1995576169 startingPage "1749" @default.
- W1995576169 abstract "A comparative study of the structural changes induced in Al/Ti and AlN/TiN multilayers by argon ion irradiation is presented. The layers were deposited on Si substrates, by ion sputtering in case of pure metals, and reactive ion sputtering in case of metal-nitrides, to a total thickness of ∼270 nm. The multilayered structures consisted of 10 alternative ∼27 nm layers of each component. For ion irradiation, we used 200 keV Ar+ ions having a projected range around mid-depth of the multilayered structures. Implantations were performed at room temperature, to the fluences from 5 × 1015 to 4 × 1016 ions/cm2. Structural characterization included Rutherford backscattering analysis and transmission electron microscopy. The obtained results demonstrate that AlN/TiN multilayered system exhibits a much higher irradiation stability compared to the Al/Ti system. In Al/Ti multilayers, we observe a progressed intermixing with increasing the ion fluence, the behavior being closer to the ballistic than to the thermal spike model. In AlN/TiN system, no interface mixing was registered for any of the applied irradiation fluencies. Different behavior compared to Al/Ti system is assigned to immiscibility of AlN and TiN." @default.
- W1995576169 created "2016-06-24" @default.
- W1995576169 creator A5010811189 @default.
- W1995576169 creator A5027929936 @default.
- W1995576169 creator A5049125918 @default.
- W1995576169 creator A5054775113 @default.
- W1995576169 creator A5060805381 @default.
- W1995576169 creator A5078140410 @default.
- W1995576169 creator A5083344770 @default.
- W1995576169 date "2008-04-01" @default.
- W1995576169 modified "2023-09-27" @default.
- W1995576169 title "On the ion irradiation stability of Al/Ti versus AlN/TiN multilayers" @default.
- W1995576169 cites W1965578575 @default.
- W1995576169 cites W1968689614 @default.
- W1995576169 cites W1971936954 @default.
- W1995576169 cites W1975302682 @default.
- W1995576169 cites W1980663136 @default.
- W1995576169 cites W1987118958 @default.
- W1995576169 cites W1994993764 @default.
- W1995576169 cites W1996412218 @default.
- W1995576169 cites W1997105298 @default.
- W1995576169 cites W1999551665 @default.
- W1995576169 cites W1999905447 @default.
- W1995576169 cites W2001818087 @default.
- W1995576169 cites W2002475665 @default.
- W1995576169 cites W2019878234 @default.
- W1995576169 cites W2034183626 @default.
- W1995576169 cites W2043196426 @default.
- W1995576169 cites W2046671525 @default.
- W1995576169 cites W2057422964 @default.
- W1995576169 cites W2067762928 @default.
- W1995576169 cites W2073600232 @default.
- W1995576169 cites W2088507762 @default.
- W1995576169 cites W2113420097 @default.
- W1995576169 cites W2163535476 @default.
- W1995576169 cites W2169417688 @default.
- W1995576169 cites W4237207149 @default.
- W1995576169 doi "https://doi.org/10.1016/j.nimb.2008.02.034" @default.
- W1995576169 hasPublicationYear "2008" @default.
- W1995576169 type Work @default.
- W1995576169 sameAs 1995576169 @default.
- W1995576169 citedByCount "12" @default.
- W1995576169 countsByYear W19955761692012 @default.
- W1995576169 countsByYear W19955761692016 @default.
- W1995576169 countsByYear W19955761692017 @default.
- W1995576169 countsByYear W19955761692018 @default.
- W1995576169 countsByYear W19955761692020 @default.
- W1995576169 crossrefType "journal-article" @default.
- W1995576169 hasAuthorship W1995576169A5010811189 @default.
- W1995576169 hasAuthorship W1995576169A5027929936 @default.
- W1995576169 hasAuthorship W1995576169A5049125918 @default.
- W1995576169 hasAuthorship W1995576169A5054775113 @default.
- W1995576169 hasAuthorship W1995576169A5060805381 @default.
- W1995576169 hasAuthorship W1995576169A5078140410 @default.
- W1995576169 hasAuthorship W1995576169A5083344770 @default.
- W1995576169 hasConcept C111337013 @default.
- W1995576169 hasConcept C113196181 @default.
- W1995576169 hasConcept C121332964 @default.
- W1995576169 hasConcept C145148216 @default.
- W1995576169 hasConcept C146088050 @default.
- W1995576169 hasConcept C159985019 @default.
- W1995576169 hasConcept C171250308 @default.
- W1995576169 hasConcept C178790620 @default.
- W1995576169 hasConcept C185544564 @default.
- W1995576169 hasConcept C185592680 @default.
- W1995576169 hasConcept C19067145 @default.
- W1995576169 hasConcept C191897082 @default.
- W1995576169 hasConcept C192562407 @default.
- W1995576169 hasConcept C194760766 @default.
- W1995576169 hasConcept C22078206 @default.
- W1995576169 hasConcept C22423302 @default.
- W1995576169 hasConcept C2779227376 @default.
- W1995576169 hasConcept C2780547777 @default.
- W1995576169 hasConcept C43617362 @default.
- W1995576169 hasConcept C525849907 @default.
- W1995576169 hasConcept C59061564 @default.
- W1995576169 hasConceptScore W1995576169C111337013 @default.
- W1995576169 hasConceptScore W1995576169C113196181 @default.
- W1995576169 hasConceptScore W1995576169C121332964 @default.
- W1995576169 hasConceptScore W1995576169C145148216 @default.
- W1995576169 hasConceptScore W1995576169C146088050 @default.
- W1995576169 hasConceptScore W1995576169C159985019 @default.
- W1995576169 hasConceptScore W1995576169C171250308 @default.
- W1995576169 hasConceptScore W1995576169C178790620 @default.
- W1995576169 hasConceptScore W1995576169C185544564 @default.
- W1995576169 hasConceptScore W1995576169C185592680 @default.
- W1995576169 hasConceptScore W1995576169C19067145 @default.
- W1995576169 hasConceptScore W1995576169C191897082 @default.
- W1995576169 hasConceptScore W1995576169C192562407 @default.
- W1995576169 hasConceptScore W1995576169C194760766 @default.
- W1995576169 hasConceptScore W1995576169C22078206 @default.
- W1995576169 hasConceptScore W1995576169C22423302 @default.
- W1995576169 hasConceptScore W1995576169C2779227376 @default.
- W1995576169 hasConceptScore W1995576169C2780547777 @default.
- W1995576169 hasConceptScore W1995576169C43617362 @default.
- W1995576169 hasConceptScore W1995576169C525849907 @default.
- W1995576169 hasConceptScore W1995576169C59061564 @default.
- W1995576169 hasIssue "8" @default.