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- W1995583597 abstract "A visible-light laser debonding technique is introduced for via-last/backside-via 3D integration. Temporary bonding of 12-inch wafers with a temporary glue and the subsequent wafer thinning processes give small TTV within 1 μm by using an auto-TTV functions. Cu-TSV daisy chains with TSV diameters of 5 μm are formed in 50-μm-thick thinned Si wafers." @default.
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- W1995583597 date "2014-07-01" @default.
- W1995583597 modified "2023-09-27" @default.
- W1995583597 title "Via-last/backside-via 3D integration using a visible-light laser debonding technique" @default.
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- W1995583597 doi "https://doi.org/10.1109/ltb-3d.2014.6886152" @default.
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