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• W1995693962 startingPage "333" @default.
• W1995693962 abstract "We have characterized surface structures of hydrogenated amorphous silicon (a-Si:H) by applying infrared attenuated total reflection spectroscopy, in order to investigate the phase transition from a-Si:H to microcrystalline silicon (μc-Si:H). At the onset of μc-Si:H nucleation from the a-Si:H phase, an infrared absorption peak at 1937±5 cm−1 assigned to the SiHn (n=1–2) complex is detected in a 5-Å thick region of the a-Si:H sub-surface. The SiHn complex concentration within the a-Si:H sub-surface region showed a clear relationship with the μc-Si:H nucleation. We propose that the SiHn complex, formed by insertion of H into a strained Si–Si bond, contributes to the reactions that result in μc-Si:H nucleus formation." @default.
• W1995693962 created "2016-06-24" @default.
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• W1995693962 date "2002-01-01" @default.
• W1995693962 modified "2023-09-27" @default.
• W1995693962 title "Microcrystalline silicon nucleation sites in the sub-surface of hydrogenated amorphous silicon" @default.
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• W1995693962 doi "https://doi.org/10.1016/s0039-6028(01)01665-x" @default.
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