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- W1995841632 abstract "A new system for controlling gas concentration in a process chamber was developed using a combination of a new flow controller and a gas pumping system. The new flow controller does not exhibit overshooting; thus, a stable gas flow rate can be realized in a process chamber after valve operation. Furthermore, very rapid gas displacement in the chamber can be realized by combined gas flow system and pumping system. As a result, it took only 2 s to stabilize chamber pressure and gas composition from purge gas to process gases using Fourier transform infrared spectroscopy (FT-IR) method. It is possible to control process parameters such as gas concentration and working pressure during the entire process using this system." @default.
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- W1995841632 date "2001-08-01" @default.
- W1995841632 modified "2023-10-18" @default.
- W1995841632 title "Precise Control of Gas Concentration Ratio in Process Chamber" @default.
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- W1995841632 doi "https://doi.org/10.1143/jjap.40.5168" @default.
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