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- W1995855686 abstract "Abstract The depth-resolved angular distribution of atoms sputtered from an amorphous Ge target under ion bombardment was calculated using the computer code OKSANA. Most simulations refer to Ar bombardment, and ion energies cover range from 0.2 to 200 keV. The distribution was registered at different stages of the collision process and approximated by a cosine function to the power n, cosnθ. For a 3.9 eV planar surface barrier, the calculated values of n agree well with the experimental data. The depth dependence of n was found to be nonmonotonic with a maximum centered at x∼3d/4, d being the distance between the nearest atoms. This is explained by the scattering of ejected recoils by near-surface atoms during the passage through the open surface atomic windows. The variations of the angular distribution of sputtered atoms with the primary ion energy and ion mass are discussed in detail." @default.
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- W1995855686 date "1999-09-01" @default.
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- W1995855686 title "Depth-dependent angular distribution of sputtered atoms" @default.
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- W1995855686 doi "https://doi.org/10.1016/s0168-583x(99)00465-6" @default.
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