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- W1995873746 abstract "Semiconductor technology in the 21st century will undergo major changes due to the significant material, engineering, and fundamental limits being approached as a consequence of scaling. Lithography is anticipated to undergo a radical change from optical to nonoptical. Device architecture and interconnects are also expected to undergo major changes in materials, structure, and fabrication technology." @default.
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- W1995873746 date "1998-03-01" @default.
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- W1995873746 title "Si-ULSI with a scaled down future" @default.
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- W1995873746 doi "https://doi.org/10.1109/101.666588" @default.
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