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- W1995899466 abstract "The continued scaling of power performance in electronic hardware for high-performance computing is rapidly beinglimited due to the large power consumption and restricted throughput of traditional electrical interconnects. One possiblesolution is to replace conventional global interconnects with a CMOS compatible intra-chip optical network, based onSilicon-On-Insulator (SOI) photonic integrated circuits. While the bandwidth and power consumption advantages of SOIoptical interconnects are potentially immense, ensuring the performance of chip-scale networks places stringentrequirements upon the control of the manufacturing process, and its influence upon the operation of individual opticalcomponents. I will present recent work on the design, fabrication, and demonstration of various passive and electroopticdevices required for high speed optical interconnect applications, including high-order optical filters and modulators.Various aspects of the CMOS compatible fabrication process used at IBM Research for manufacturing SOI photonicwire circuits will be discussed, including waveguide loss, surface roughness, device dimensions, and microresonatorfrequency uniformity." @default.
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- W1995899466 date "2008-02-07" @default.
- W1995899466 modified "2023-10-16" @default.
- W1995899466 title "Silicon photonic wire circuits for on-chip optical interconnects" @default.
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- W1995899466 doi "https://doi.org/10.1117/12.767340" @default.
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