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• W1995919308 abstract "Parallel synthesis together with high-throughput screening was used to identify candidate materials for integrated circuit applications that demand a superior high permittivity dielectric thin film. Specifically, we developed a “continuous-composition spread” (CCS) technique to synthesize much of a pseudoternary oxide system in a single deposition and used this in conjunction with a high-throughput measurement protocol, thereby allowing each chemical system to be deposited and evaluated in about 24 h. This approach led to the identification of compositions in the Zr-Sn-Ti-O system with promising properties. The same technique was used to determine the optimum compositions as a function of processing parameters. Films with the composition Zr.2Sn.2Ti.6O2 were then prepared using a conventional synthetic technique (on-axis sputtering) and were verified to have excellent properties. Thus, the CCS technique has demonstrated utility in rapidly identifying and developing a useful new material. © 1999 John Wiley & Sons, Inc. Biotechnol Bioeng (Comb Chem) 61:217–225, 1998/1999." @default.
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• W1995919308 date "1999-01-01" @default.
• W1995919308 modified "2023-10-15" @default.
• W1995919308 title "A high-throughput search for electronic materials-thin-film dielectrics" @default.
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• W1995919308 doi "https://doi.org/10.1002/(sici)1097-0290(1998)61:4<217::aid-cc4>3.0.co;2-l" @default.
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