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- W1995931906 abstract "Processing of S13N4 arid Zr02 ceramics was rerformed by using ArF , KrF and XeF excimer lasers with mainly mask projection, and characteristics of ceramic processing and surface appearance were analyzed. Focused excimer laser beam from unstable resonator was also used for cutting, and compared with focused c02 and YAG lasers of nonnal pulse. Material removal process of excimer lasers was compared with O2 and YAG lasers of normal pulse on the basis of energy analysis, X-ray diffraction and spectral analysis during ablation of Si3N4 . It was found that in material processing by 002 and YAG lasers, Si3N4 is decomposed into N and liquid Si, which attaches to the surface, producing roughened surface with cracks . On the other hand, in excimer laser processing, Si3N4 is decomposed into Si. (g) and N with accompanying ionized Si by its high peak power , resulting in excellent quality of processing without deposition of decomposed materials . The mechanism of uneven laser processing in Si3N4 and Zr02 ceramics was also discussed." @default.
- W1995931906 created "2016-06-24" @default.
- W1995931906 creator A5030579382 @default.
- W1995931906 creator A5063978809 @default.
- W1995931906 date "1990-08-01" @default.
- W1995931906 modified "2023-10-17" @default.
- W1995931906 title "<title>Processing of ceramics by excimer lasers</title>" @default.
- W1995931906 doi "https://doi.org/10.1117/12.20622" @default.
- W1995931906 hasPublicationYear "1990" @default.
- W1995931906 type Work @default.
- W1995931906 sameAs 1995931906 @default.
- W1995931906 citedByCount "12" @default.
- W1995931906 countsByYear W19959319062013 @default.
- W1995931906 countsByYear W19959319062014 @default.
- W1995931906 countsByYear W19959319062017 @default.
- W1995931906 crossrefType "proceedings-article" @default.
- W1995931906 hasAuthorship W1995931906A5030579382 @default.
- W1995931906 hasAuthorship W1995931906A5063978809 @default.
- W1995931906 hasConcept C100536367 @default.
- W1995931906 hasConcept C120665830 @default.
- W1995931906 hasConcept C121332964 @default.
- W1995931906 hasConcept C134132462 @default.
- W1995931906 hasConcept C159985019 @default.
- W1995931906 hasConcept C192562407 @default.
- W1995931906 hasConcept C200649887 @default.
- W1995931906 hasConcept C2780477314 @default.
- W1995931906 hasConcept C49040817 @default.
- W1995931906 hasConcept C520434653 @default.
- W1995931906 hasConcept C74561354 @default.
- W1995931906 hasConceptScore W1995931906C100536367 @default.
- W1995931906 hasConceptScore W1995931906C120665830 @default.
- W1995931906 hasConceptScore W1995931906C121332964 @default.
- W1995931906 hasConceptScore W1995931906C134132462 @default.
- W1995931906 hasConceptScore W1995931906C159985019 @default.
- W1995931906 hasConceptScore W1995931906C192562407 @default.
- W1995931906 hasConceptScore W1995931906C200649887 @default.
- W1995931906 hasConceptScore W1995931906C2780477314 @default.
- W1995931906 hasConceptScore W1995931906C49040817 @default.
- W1995931906 hasConceptScore W1995931906C520434653 @default.
- W1995931906 hasConceptScore W1995931906C74561354 @default.
- W1995931906 hasLocation W19959319061 @default.
- W1995931906 hasOpenAccess W1995931906 @default.
- W1995931906 hasPrimaryLocation W19959319061 @default.
- W1995931906 hasRelatedWork W1630995854 @default.
- W1995931906 hasRelatedWork W180547513 @default.
- W1995931906 hasRelatedWork W2021990775 @default.
- W1995931906 hasRelatedWork W2043636604 @default.
- W1995931906 hasRelatedWork W2070831007 @default.
- W1995931906 hasRelatedWork W2130130779 @default.
- W1995931906 hasRelatedWork W2317557264 @default.
- W1995931906 hasRelatedWork W2415424868 @default.
- W1995931906 hasRelatedWork W2489769816 @default.
- W1995931906 hasRelatedWork W84543526 @default.
- W1995931906 isParatext "false" @default.
- W1995931906 isRetracted "false" @default.
- W1995931906 magId "1995931906" @default.
- W1995931906 workType "article" @default.