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• W1996042556 abstract "We have applied real time spectroellipsometry to measure the nucleation and growth of hydrogenated amorphous silicon (a-Si:H) films prepared by plasma-enhanced chemical vapor deposition from H2-diluted SiH4 on crystalline Si (c-Si) substrates at 200°C. For a H2-dilution ratio R=[H2]/[SiH4] of 10, optimum microstructural evolution is observed during the growth of 0.3 μm a-Si:H film, namely, smoothening during coalescence followed by long-term surface stability. At lower and higher R values, surface roughening in the thick film regime (d>20 nm) is larger, particularly for R≥20 due to crystallite development. Although dilution levels of 20≤R≤30 lead to microcrystallinity in thick films (0.3 μm), the structural evolution and optical properties in thin films (<20 nm) are characteristic of high quality a-Si:H. Thus, real time spectroellipsometry suggests that in the preparation of i-layers for solar cells, R∼10 may be optimum for the bulk i-layer whereas a 10 to 20 nm layer with much larger R may be beneficial at the p/i-interface. These suggestions have been verified in p–i–n cells deposited on specular SnO2-coated glass substrates." @default.
• W1996042556 created "2016-06-24" @default.
• W1996042556 creator A5004709233 @default.
• W1996042556 creator A5042160153 @default.
• W1996042556 creator A5066659705 @default.
• W1996042556 creator A5078004951 @default.
• W1996042556 creator A5085714327 @default.
• W1996042556 date "1998-05-01" @default.
• W1996042556 modified "2023-09-27" @default.
• W1996042556 title "Microstructural evolution of a-Si:H prepared using hydrogen dilution of silane studied by real time spectroellipsometry" @default.
• W1996042556 cites W1918606316 @default.
• W1996042556 cites W1978050942 @default.
• W1996042556 cites W1979712151 @default.
• W1996042556 cites W2010404113 @default.
• W1996042556 cites W2015652217 @default.
• W1996042556 cites W2019432344 @default.
• W1996042556 cites W2059403731 @default.
• W1996042556 cites W2078458968 @default.
• W1996042556 cites W2152181188 @default.
• W1996042556 cites W2216356668 @default.
• W1996042556 cites W2314634084 @default.
• W1996042556 doi "https://doi.org/10.1016/s0022-3093(98)00023-4" @default.
• W1996042556 hasPublicationYear "1998" @default.
• W1996042556 type Work @default.
• W1996042556 sameAs 1996042556 @default.
• W1996042556 citedByCount "6" @default.
• W1996042556 countsByYear W19960425562015 @default.
• W1996042556 crossrefType "journal-article" @default.
• W1996042556 hasAuthorship W1996042556A5004709233 @default.
• W1996042556 hasAuthorship W1996042556A5042160153 @default.
• W1996042556 hasAuthorship W1996042556A5066659705 @default.
• W1996042556 hasAuthorship W1996042556A5078004951 @default.
• W1996042556 hasAuthorship W1996042556A5085714327 @default.
• W1996042556 hasConcept C113196181 @default.
• W1996042556 hasConcept C121332964 @default.
• W1996042556 hasConcept C127413603 @default.
• W1996042556 hasConcept C137637335 @default.
• W1996042556 hasConcept C149792144 @default.
• W1996042556 hasConcept C159985019 @default.
• W1996042556 hasConcept C171250308 @default.
• W1996042556 hasConcept C178790620 @default.
• W1996042556 hasConcept C185592680 @default.
• W1996042556 hasConcept C191897082 @default.
• W1996042556 hasConcept C192562407 @default.
• W1996042556 hasConcept C2778024649 @default.
• W1996042556 hasConcept C2779227376 @default.
• W1996042556 hasConcept C2780565262 @default.
• W1996042556 hasConcept C42360764 @default.
• W1996042556 hasConcept C43617362 @default.
• W1996042556 hasConcept C49040817 @default.
• W1996042556 hasConcept C544956773 @default.
• W1996042556 hasConcept C56052488 @default.
• W1996042556 hasConcept C57410435 @default.
• W1996042556 hasConcept C61048295 @default.
• W1996042556 hasConcept C8010536 @default.
• W1996042556 hasConcept C87355193 @default.
• W1996042556 hasConcept C87359718 @default.
• W1996042556 hasConcept C96618451 @default.
• W1996042556 hasConcept C97355855 @default.
• W1996042556 hasConceptScore W1996042556C113196181 @default.
• W1996042556 hasConceptScore W1996042556C121332964 @default.
• W1996042556 hasConceptScore W1996042556C127413603 @default.
• W1996042556 hasConceptScore W1996042556C137637335 @default.
• W1996042556 hasConceptScore W1996042556C149792144 @default.
• W1996042556 hasConceptScore W1996042556C159985019 @default.
• W1996042556 hasConceptScore W1996042556C171250308 @default.
• W1996042556 hasConceptScore W1996042556C178790620 @default.
• W1996042556 hasConceptScore W1996042556C185592680 @default.
• W1996042556 hasConceptScore W1996042556C191897082 @default.
• W1996042556 hasConceptScore W1996042556C192562407 @default.
• W1996042556 hasConceptScore W1996042556C2778024649 @default.
• W1996042556 hasConceptScore W1996042556C2779227376 @default.
• W1996042556 hasConceptScore W1996042556C2780565262 @default.
• W1996042556 hasConceptScore W1996042556C42360764 @default.
• W1996042556 hasConceptScore W1996042556C43617362 @default.
• W1996042556 hasConceptScore W1996042556C49040817 @default.
• W1996042556 hasConceptScore W1996042556C544956773 @default.
• W1996042556 hasConceptScore W1996042556C56052488 @default.
• W1996042556 hasConceptScore W1996042556C57410435 @default.
• W1996042556 hasConceptScore W1996042556C61048295 @default.
• W1996042556 hasConceptScore W1996042556C8010536 @default.
• W1996042556 hasConceptScore W1996042556C87355193 @default.
• W1996042556 hasConceptScore W1996042556C87359718 @default.
• W1996042556 hasConceptScore W1996042556C96618451 @default.
• W1996042556 hasConceptScore W1996042556C97355855 @default.
• W1996042556 hasLocation W19960425561 @default.
• W1996042556 hasOpenAccess W1996042556 @default.
• W1996042556 hasPrimaryLocation W19960425561 @default.
• W1996042556 hasRelatedWork W1978094409 @default.
• W1996042556 hasRelatedWork W1984215766 @default.
• W1996042556 hasRelatedWork W1991300208 @default.
• W1996042556 hasRelatedWork W1993181176 @default.
• W1996042556 hasRelatedWork W1993510541 @default.
• W1996042556 hasRelatedWork W1995685395 @default.
• W1996042556 hasRelatedWork W2005916168 @default.
• W1996042556 hasRelatedWork W2010993588 @default.
• W1996042556 hasRelatedWork W2015777300 @default.
• W1996042556 hasRelatedWork W2020007067 @default.
• W1996042556 hasRelatedWork W2026005392 @default.
• W1996042556 hasRelatedWork W2027234887 @default.

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