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- W1996044593 abstract "A self-aligned GaAlAs/GaAs HBT technology with tungsten emitter and base ohmic contacts is presented. The HBT's layers are grown by MBE, the emitter contact layer is Ga 0.35 In 0.65 As. A Zinc diffusion allows for contacting the extrinsic base layer. Self-alignment is obtained by the diffusion around the emitter mesa; nitride spacers are used to isolate the intrinsic area during the diffusion process." @default.
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- W1996044593 date "1991-10-01" @default.
- W1996044593 modified "2023-09-25" @default.
- W1996044593 title "Self-aligned AlGaAs/GaAs HBT's with tungsten N and P type ohmic contacts" @default.
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- W1996044593 doi "https://doi.org/10.1016/0167-9317(91)90204-q" @default.
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