Matches in SemOpenAlex for { <https://semopenalex.org/work/W1996186819> ?p ?o ?g. }
Showing items 1 to 68 of
68
with 100 items per page.
- W1996186819 endingPage "508" @default.
- W1996186819 startingPage "501" @default.
- W1996186819 abstract "Abstract Ion—molecule reactions between SiH+3 and NH3 have been studied for elucidating the mechanism of the reactions in the plasma enhanced chemical vapor deposition of silicon nitride by using ab initio quantum chemical techniques. Our calculation predicted that eliminative addition (EA) and proton transfer (PT) are dominant processes, but hydrogen abstraction, electron transfer and hydride transfer are negligible. This is in good agreement with recent experimental results showing that EA and PT are the primary channels observed in the reactions between SiH+3 and NH3 by using Fourier transform mass spectrometry [I. Haller, J. Phys. Chem., 94 (1990) 4135]." @default.
- W1996186819 created "2016-06-24" @default.
- W1996186819 creator A5024114769 @default.
- W1996186819 creator A5040131997 @default.
- W1996186819 creator A5059147537 @default.
- W1996186819 creator A5063901413 @default.
- W1996186819 creator A5075653507 @default.
- W1996186819 date "1993-12-01" @default.
- W1996186819 modified "2023-10-12" @default.
- W1996186819 title "Ion—molecule reactions between SiH+3 and NH3" @default.
- W1996186819 cites W1977795143 @default.
- W1996186819 cites W1984994488 @default.
- W1996186819 cites W1993013485 @default.
- W1996186819 cites W2018775403 @default.
- W1996186819 cites W2029954080 @default.
- W1996186819 cites W2033990154 @default.
- W1996186819 cites W2044940178 @default.
- W1996186819 cites W2045422561 @default.
- W1996186819 cites W2050453167 @default.
- W1996186819 cites W2065932591 @default.
- W1996186819 cites W2088682389 @default.
- W1996186819 cites W2091001676 @default.
- W1996186819 doi "https://doi.org/10.1016/0022-2860(93)87042-8" @default.
- W1996186819 hasPublicationYear "1993" @default.
- W1996186819 type Work @default.
- W1996186819 sameAs 1996186819 @default.
- W1996186819 citedByCount "11" @default.
- W1996186819 countsByYear W19961868192012 @default.
- W1996186819 countsByYear W19961868192017 @default.
- W1996186819 crossrefType "journal-article" @default.
- W1996186819 hasAuthorship W1996186819A5024114769 @default.
- W1996186819 hasAuthorship W1996186819A5040131997 @default.
- W1996186819 hasAuthorship W1996186819A5059147537 @default.
- W1996186819 hasAuthorship W1996186819A5063901413 @default.
- W1996186819 hasAuthorship W1996186819A5075653507 @default.
- W1996186819 hasConcept C145148216 @default.
- W1996186819 hasConcept C147597530 @default.
- W1996186819 hasConcept C178790620 @default.
- W1996186819 hasConcept C185592680 @default.
- W1996186819 hasConcept C32909587 @default.
- W1996186819 hasConcept C75473681 @default.
- W1996186819 hasConceptScore W1996186819C145148216 @default.
- W1996186819 hasConceptScore W1996186819C147597530 @default.
- W1996186819 hasConceptScore W1996186819C178790620 @default.
- W1996186819 hasConceptScore W1996186819C185592680 @default.
- W1996186819 hasConceptScore W1996186819C32909587 @default.
- W1996186819 hasConceptScore W1996186819C75473681 @default.
- W1996186819 hasFunder F4320320912 @default.
- W1996186819 hasLocation W19961868191 @default.
- W1996186819 hasOpenAccess W1996186819 @default.
- W1996186819 hasPrimaryLocation W19961868191 @default.
- W1996186819 hasRelatedWork W1531601525 @default.
- W1996186819 hasRelatedWork W2083597126 @default.
- W1996186819 hasRelatedWork W2384464875 @default.
- W1996186819 hasRelatedWork W2606230654 @default.
- W1996186819 hasRelatedWork W2607424097 @default.
- W1996186819 hasRelatedWork W2748952813 @default.
- W1996186819 hasRelatedWork W2899084033 @default.
- W1996186819 hasRelatedWork W2948807893 @default.
- W1996186819 hasRelatedWork W4387497383 @default.
- W1996186819 hasRelatedWork W2778153218 @default.
- W1996186819 hasVolume "300" @default.
- W1996186819 isParatext "false" @default.
- W1996186819 isRetracted "false" @default.
- W1996186819 magId "1996186819" @default.
- W1996186819 workType "article" @default.