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- W1996262034 abstract "Abstract SIMS depth profiles of Ag/Si, Mg/Si and W/Si multilayer structures were measured over the temperature range of 80–775 K in order to study the temperature-independent and temperature-dependent contributions to atomic mixing. For the Ag/Si system, thermally activated diffusion dominates the mixing above 675 K. For the Mg/Si system the broadening appears temperature independent over the entire range studied. In the W/Si system the observed mixing is attributed to increased radiation enhanced diffusion and to compound formation. An interesting oxygen “gettering” effect is also observed in the MgSi multilayers." @default.
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- W1996262034 date "1986-04-01" @default.
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- W1996262034 title "SIMS analysis of thermal and ion-beam induced broadening of thin metal markers in silicon" @default.
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- W1996262034 doi "https://doi.org/10.1016/0168-583x(86)90283-1" @default.
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