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- W1996314897 abstract "In recent years Micro Electro Mechanical Systems (MEMS) and Micro Opto Electro Mechanical Systems (MOEMS) have grown in importance, especially in smart structure applications. In this paper a theoretical comparative study is made analyzing three different types of micro pressure sensors. MEMS type pressure sensors of the piezo-resistive and capacitive type are considered along with MOEM pressure sensor of the Fabry-Perot interferometric type. It is found that piezo resistive and capacitive pressure sensors in the micro form attain improved noise performance as compared to their bulk counterparts. The opto-mechanical sensors shows better noise performance than the capacitive sensor, when the limiting noise is due to Brownian motion." @default.
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- W1996314897 date "1999-07-20" @default.
- W1996314897 modified "2023-09-26" @default.
- W1996314897 title "<title>Noise analysis and a comparative study of noise in MEMS and MOEMS</title>" @default.
- W1996314897 doi "https://doi.org/10.1117/12.354293" @default.
- W1996314897 hasPublicationYear "1999" @default.
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