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- W1996376365 abstract "This paper presents the results of an investigation on selective deposition of silicon oxide using poly-perfluoro-alkylacrylate (PPFAA) which has a significantly low surface energy. Under the condition that silicon oxide film can be deposited on Si, SiO 2 and OFPR resist, no deposition is observed on PPFAA. This technique is successfully applied to the formation of fine patterns having a minimum dimension of 0.1 µm." @default.
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- W1996376365 title "Selective Deposition of Silicon Oxide and Its Application" @default.
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- W1996376365 doi "https://doi.org/10.1143/jjap.25.l24" @default.
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