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- W1996465108 abstract "During hybrid lithography of thermal nanoimprint with optical lithography, where both steps are performed within one single resist layer, changes of the lithographic performance of the material used during the first step, the thermal imprint, are essential for the overall lithography result. In order to characterize such changes two positive tone photoresists, AZ-1505 and ARP- 3510, were characterized by measurement of dose curves (relative resist layer thickness remaining after exposure and development) after a specific temperature treatment simulating the thermal imprint step. Obviously the two materials are affected in a somewhat different way. After temperature treatment at 120°C, ARP-3510 still features a higher sensitivity than AZ-1505, but the latter shows a higher contrast." @default.
- W1996465108 created "2016-06-24" @default.
- W1996465108 creator A5007286757 @default.
- W1996465108 creator A5030192962 @default.
- W1996465108 creator A5037243336 @default.
- W1996465108 creator A5064634763 @default.
- W1996465108 creator A5087901663 @default.
- W1996465108 date "2011-02-02" @default.
- W1996465108 modified "2023-09-23" @default.
- W1996465108 title "Thermal nanoimprint (T-NIL) with photoresists for hybrid lithography" @default.
- W1996465108 doi "https://doi.org/10.1117/12.882805" @default.
- W1996465108 hasPublicationYear "2011" @default.
- W1996465108 type Work @default.
- W1996465108 sameAs 1996465108 @default.
- W1996465108 citedByCount "1" @default.
- W1996465108 crossrefType "proceedings-article" @default.
- W1996465108 hasAuthorship W1996465108A5007286757 @default.
- W1996465108 hasAuthorship W1996465108A5030192962 @default.
- W1996465108 hasAuthorship W1996465108A5037243336 @default.
- W1996465108 hasAuthorship W1996465108A5064634763 @default.
- W1996465108 hasAuthorship W1996465108A5087901663 @default.
- W1996465108 hasConcept C105487726 @default.
- W1996465108 hasConcept C120665830 @default.
- W1996465108 hasConcept C121332964 @default.
- W1996465108 hasConcept C136525101 @default.
- W1996465108 hasConcept C142724271 @default.
- W1996465108 hasConcept C153294291 @default.
- W1996465108 hasConcept C162117346 @default.
- W1996465108 hasConcept C163581340 @default.
- W1996465108 hasConcept C171250308 @default.
- W1996465108 hasConcept C192562407 @default.
- W1996465108 hasConcept C200274948 @default.
- W1996465108 hasConcept C204223013 @default.
- W1996465108 hasConcept C204530211 @default.
- W1996465108 hasConcept C204787440 @default.
- W1996465108 hasConcept C2777046567 @default.
- W1996465108 hasConcept C2779227376 @default.
- W1996465108 hasConcept C41794268 @default.
- W1996465108 hasConcept C49040817 @default.
- W1996465108 hasConcept C53524968 @default.
- W1996465108 hasConcept C71924100 @default.
- W1996465108 hasConceptScore W1996465108C105487726 @default.
- W1996465108 hasConceptScore W1996465108C120665830 @default.
- W1996465108 hasConceptScore W1996465108C121332964 @default.
- W1996465108 hasConceptScore W1996465108C136525101 @default.
- W1996465108 hasConceptScore W1996465108C142724271 @default.
- W1996465108 hasConceptScore W1996465108C153294291 @default.
- W1996465108 hasConceptScore W1996465108C162117346 @default.
- W1996465108 hasConceptScore W1996465108C163581340 @default.
- W1996465108 hasConceptScore W1996465108C171250308 @default.
- W1996465108 hasConceptScore W1996465108C192562407 @default.
- W1996465108 hasConceptScore W1996465108C200274948 @default.
- W1996465108 hasConceptScore W1996465108C204223013 @default.
- W1996465108 hasConceptScore W1996465108C204530211 @default.
- W1996465108 hasConceptScore W1996465108C204787440 @default.
- W1996465108 hasConceptScore W1996465108C2777046567 @default.
- W1996465108 hasConceptScore W1996465108C2779227376 @default.
- W1996465108 hasConceptScore W1996465108C41794268 @default.
- W1996465108 hasConceptScore W1996465108C49040817 @default.
- W1996465108 hasConceptScore W1996465108C53524968 @default.
- W1996465108 hasConceptScore W1996465108C71924100 @default.
- W1996465108 hasLocation W19964651081 @default.
- W1996465108 hasOpenAccess W1996465108 @default.
- W1996465108 hasPrimaryLocation W19964651081 @default.
- W1996465108 hasRelatedWork W1534103146 @default.
- W1996465108 hasRelatedWork W1844623463 @default.
- W1996465108 hasRelatedWork W1949026586 @default.
- W1996465108 hasRelatedWork W1988594448 @default.
- W1996465108 hasRelatedWork W2114881997 @default.
- W1996465108 hasRelatedWork W2117160343 @default.
- W1996465108 hasRelatedWork W2500364019 @default.
- W1996465108 hasRelatedWork W2883461808 @default.
- W1996465108 hasRelatedWork W573585812 @default.
- W1996465108 hasRelatedWork W2110224568 @default.
- W1996465108 isParatext "false" @default.
- W1996465108 isRetracted "false" @default.
- W1996465108 magId "1996465108" @default.
- W1996465108 workType "article" @default.