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• W1996496369 abstract "Abstract Plasmas play a critical role in depositing thin films or etching fine patterns while manufacturing integrated circuits. A new model for plasma diagnosis is presented. This was accomplished by linking atomic force microscopy (AFM) to plasma parameters using a neural network. Experimental AFM data were collected during the etching of silicon oxynitride films in C2F6 inductively coupled plasma. Surface roughness of etched patterns was characterized by means of discrete wavelet transformation. This led to the construction of three vertical (type I), diagonal (type II), and horizontal (type III) wavelet coefficient-based models. The performance of diagnosis models was evaluated in terms of the prediction and recognition accuracies. Both accuracies were optimized as a function of the number of hidden neurons. Comparisons revealed that the type I model yielded the largest recognition and the smallest prediction error. This was demonstrated even under stricter monitoring conditions. More improved diagnosis is expected by enhancing AFM resolution." @default.
• W1996496369 created "2016-06-24" @default.
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• W1996496369 date "2007-09-01" @default.
• W1996496369 modified "2023-09-25" @default.
• W1996496369 title "Use of a neural network to link AFM etch patterns to plasma parameters" @default.
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• W1996496369 doi "https://doi.org/10.1016/j.vacuum.2007.03.009" @default.
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