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- W1996514916 abstract "A few kinds of N-hydroxy maleopimarimide sulfonate derivatives were synthesized. These compounds have high solubility in commonly used solvents and high thermal stability. The UV absorption properties of these compounds in polyethylene glycol film indicate that they have suitable absorption and transparency at 193 nm wavelength. The photolysis and lithography of these compounds under radiation of low pressure Hg lamp were studied." @default.
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- W1996514916 date "2004-05-14" @default.
- W1996514916 modified "2023-09-26" @default.
- W1996514916 title "The synthesis and properties of N-hydroxy maleopimarimide sulfonate derivatives as PAG and inhibitor for deep-UV photoresist" @default.
- W1996514916 doi "https://doi.org/10.1117/12.534513" @default.
- W1996514916 hasPublicationYear "2004" @default.
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