Matches in SemOpenAlex for { <https://semopenalex.org/work/W1996576053> ?p ?o ?g. }
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- W1996576053 endingPage "2219" @default.
- W1996576053 startingPage "2215" @default.
- W1996576053 abstract "Dielectric layer containing CoSi2 nanocrystals was directly fabricated by plasma-enhanced atomic layer deposition using CoCp2 and NH3 plasma mixed with SiH4 without annealing process. Synchrotron radiation X-ray diffraction and X-ray photoelectron spectroscopy results confirmed the formation of CoSi2 nanocrystal. The gate stack composed of dielectric layer containing CoSi2 nanocrystals with ALD HfO2 capping layer together with Ru metal gate was analyzed by capacitance–voltage (C–V) measurement. Large hysteresis of C–V curves indicated charge trap effects of CoSi2 nanocrystals. The current process provides simple route for the fabrication of nanocrystal memory compatible with the current Si device unit processes." @default.
- W1996576053 created "2016-06-24" @default.
- W1996576053 creator A5044553288 @default.
- W1996576053 creator A5057497927 @default.
- W1996576053 date "2010-07-01" @default.
- W1996576053 modified "2023-09-28" @default.
- W1996576053 title "Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition" @default.
- W1996576053 cites W1589686892 @default.
- W1996576053 cites W1964529305 @default.
- W1996576053 cites W1970541974 @default.
- W1996576053 cites W1982799024 @default.
- W1996576053 cites W1989603984 @default.
- W1996576053 cites W2003751075 @default.
- W1996576053 cites W2025209357 @default.
- W1996576053 cites W2029891808 @default.
- W1996576053 cites W2042894806 @default.
- W1996576053 cites W2044714129 @default.
- W1996576053 cites W2046257749 @default.
- W1996576053 cites W2066805579 @default.
- W1996576053 cites W2072543486 @default.
- W1996576053 cites W2088644333 @default.
- W1996576053 cites W2089461228 @default.
- W1996576053 cites W2091154284 @default.
- W1996576053 cites W2103838121 @default.
- W1996576053 cites W2162163123 @default.
- W1996576053 cites W2166624961 @default.
- W1996576053 cites W2170323059 @default.
- W1996576053 cites W3003652634 @default.
- W1996576053 doi "https://doi.org/10.1016/j.jcrysgro.2010.04.048" @default.
- W1996576053 hasPublicationYear "2010" @default.
- W1996576053 type Work @default.
- W1996576053 sameAs 1996576053 @default.
- W1996576053 citedByCount "15" @default.
- W1996576053 countsByYear W19965760532012 @default.
- W1996576053 countsByYear W19965760532013 @default.
- W1996576053 countsByYear W19965760532014 @default.
- W1996576053 countsByYear W19965760532015 @default.
- W1996576053 countsByYear W19965760532016 @default.
- W1996576053 countsByYear W19965760532017 @default.
- W1996576053 countsByYear W19965760532018 @default.
- W1996576053 crossrefType "journal-article" @default.
- W1996576053 hasAuthorship W1996576053A5044553288 @default.
- W1996576053 hasAuthorship W1996576053A5057497927 @default.
- W1996576053 hasConcept C121332964 @default.
- W1996576053 hasConcept C127413603 @default.
- W1996576053 hasConcept C133386390 @default.
- W1996576053 hasConcept C151730666 @default.
- W1996576053 hasConcept C171250308 @default.
- W1996576053 hasConcept C175854130 @default.
- W1996576053 hasConcept C185592680 @default.
- W1996576053 hasConcept C192562407 @default.
- W1996576053 hasConcept C2779227376 @default.
- W1996576053 hasConcept C2816523 @default.
- W1996576053 hasConcept C42360764 @default.
- W1996576053 hasConcept C49040817 @default.
- W1996576053 hasConcept C62520636 @default.
- W1996576053 hasConcept C62960913 @default.
- W1996576053 hasConcept C64297162 @default.
- W1996576053 hasConcept C69544855 @default.
- W1996576053 hasConcept C82706917 @default.
- W1996576053 hasConcept C86803240 @default.
- W1996576053 hasConceptScore W1996576053C121332964 @default.
- W1996576053 hasConceptScore W1996576053C127413603 @default.
- W1996576053 hasConceptScore W1996576053C133386390 @default.
- W1996576053 hasConceptScore W1996576053C151730666 @default.
- W1996576053 hasConceptScore W1996576053C171250308 @default.
- W1996576053 hasConceptScore W1996576053C175854130 @default.
- W1996576053 hasConceptScore W1996576053C185592680 @default.
- W1996576053 hasConceptScore W1996576053C192562407 @default.
- W1996576053 hasConceptScore W1996576053C2779227376 @default.
- W1996576053 hasConceptScore W1996576053C2816523 @default.
- W1996576053 hasConceptScore W1996576053C42360764 @default.
- W1996576053 hasConceptScore W1996576053C49040817 @default.
- W1996576053 hasConceptScore W1996576053C62520636 @default.
- W1996576053 hasConceptScore W1996576053C62960913 @default.
- W1996576053 hasConceptScore W1996576053C64297162 @default.
- W1996576053 hasConceptScore W1996576053C69544855 @default.
- W1996576053 hasConceptScore W1996576053C82706917 @default.
- W1996576053 hasConceptScore W1996576053C86803240 @default.
- W1996576053 hasIssue "15" @default.
- W1996576053 hasLocation W19965760531 @default.
- W1996576053 hasOpenAccess W1996576053 @default.
- W1996576053 hasPrimaryLocation W19965760531 @default.
- W1996576053 hasRelatedWork W1857408817 @default.
- W1996576053 hasRelatedWork W2102458125 @default.
- W1996576053 hasRelatedWork W2117310956 @default.
- W1996576053 hasRelatedWork W2234492817 @default.
- W1996576053 hasRelatedWork W3010468778 @default.
- W1996576053 hasRelatedWork W3015015342 @default.
- W1996576053 hasRelatedWork W3213482466 @default.
- W1996576053 hasRelatedWork W4287417083 @default.
- W1996576053 hasRelatedWork W4300451143 @default.
- W1996576053 hasRelatedWork W4308909141 @default.
- W1996576053 hasVolume "312" @default.
- W1996576053 isParatext "false" @default.
- W1996576053 isRetracted "false" @default.
- W1996576053 magId "1996576053" @default.
- W1996576053 workType "article" @default.