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- W1996652421 abstract "The operation of an electrostatically-driven 3D micro-optomechanical resonant torsion mirror scanner is described. The device is fabricated in bonded silicon-on-insulator and self-assembled by out-of plane rotation powered by a surface tension torque obtained by photoresist melting. A scan angle of 16/spl deg/ is obtained at a drive frequency of 2.6 kHz using a voltage of 175 V." @default.
- W1996652421 created "2016-06-24" @default.
- W1996652421 creator A5019819013 @default.
- W1996652421 date "1999-01-01" @default.
- W1996652421 modified "2023-09-24" @default.
- W1996652421 title "Operation of surface-tension self-assembled 3D micro-optomechanical torsion mirror scanner" @default.
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- W1996652421 doi "https://doi.org/10.1049/el:19990833" @default.
- W1996652421 hasPublicationYear "1999" @default.
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