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- W1996656102 endingPage "074006" @default.
- W1996656102 startingPage "074006" @default.
- W1996656102 abstract "In this paper we present a successful integration scheme of a backside (BS) illuminated 1024 × 1024 pixel, 30 µm thin, sensor array that is flip chipped on a read-out IC die with 10 µm diameter indium micro bumps, where the pixel pitch is 22.5 µm. A novel BS alignment strategy to avoid Pyrex glass as a temporary carrier for wafer thinning is described. Pyrex is namely not compatible in a high-end Si process environment due to its fragile and contaminating nature. Further special attention is given to critical steps leading toward high broadband quantum efficiency of 80–90%. It is also shown that through the introduction of high aspect ratio pixel separating trenches, inter-pixel electrical crosstalk can be avoided." @default.
- W1996656102 created "2016-06-24" @default.
- W1996656102 creator A5032184243 @default.
- W1996656102 creator A5037674550 @default.
- W1996656102 creator A5049170276 @default.
- W1996656102 creator A5051133049 @default.
- W1996656102 creator A5078134929 @default.
- W1996656102 creator A5079301904 @default.
- W1996656102 creator A5088302843 @default.
- W1996656102 date "2011-06-22" @default.
- W1996656102 modified "2023-09-25" @default.
- W1996656102 title "On the processing aspects of high performance hybrid backside illuminated CMOS imagers" @default.
- W1996656102 cites W2017966532 @default.
- W1996656102 cites W2056328408 @default.
- W1996656102 doi "https://doi.org/10.1088/0960-1317/21/7/074006" @default.
- W1996656102 hasPublicationYear "2011" @default.
- W1996656102 type Work @default.
- W1996656102 sameAs 1996656102 @default.
- W1996656102 citedByCount "2" @default.
- W1996656102 countsByYear W19966561022012 @default.
- W1996656102 countsByYear W19966561022013 @default.
- W1996656102 crossrefType "journal-article" @default.
- W1996656102 hasAuthorship W1996656102A5032184243 @default.
- W1996656102 hasAuthorship W1996656102A5037674550 @default.
- W1996656102 hasAuthorship W1996656102A5049170276 @default.
- W1996656102 hasAuthorship W1996656102A5051133049 @default.
- W1996656102 hasAuthorship W1996656102A5078134929 @default.
- W1996656102 hasAuthorship W1996656102A5079301904 @default.
- W1996656102 hasAuthorship W1996656102A5088302843 @default.
- W1996656102 hasConcept C119599485 @default.
- W1996656102 hasConcept C127413603 @default.
- W1996656102 hasConcept C192562407 @default.
- W1996656102 hasConcept C41008148 @default.
- W1996656102 hasConcept C46362747 @default.
- W1996656102 hasConcept C49040817 @default.
- W1996656102 hasConcept C9390403 @default.
- W1996656102 hasConceptScore W1996656102C119599485 @default.
- W1996656102 hasConceptScore W1996656102C127413603 @default.
- W1996656102 hasConceptScore W1996656102C192562407 @default.
- W1996656102 hasConceptScore W1996656102C41008148 @default.
- W1996656102 hasConceptScore W1996656102C46362747 @default.
- W1996656102 hasConceptScore W1996656102C49040817 @default.
- W1996656102 hasConceptScore W1996656102C9390403 @default.
- W1996656102 hasIssue "7" @default.
- W1996656102 hasLocation W19966561021 @default.
- W1996656102 hasOpenAccess W1996656102 @default.
- W1996656102 hasPrimaryLocation W19966561021 @default.
- W1996656102 hasRelatedWork W2058676402 @default.
- W1996656102 hasRelatedWork W2059363835 @default.
- W1996656102 hasRelatedWork W2139871202 @default.
- W1996656102 hasRelatedWork W2292675962 @default.
- W1996656102 hasRelatedWork W2329285141 @default.
- W1996656102 hasRelatedWork W2399397734 @default.
- W1996656102 hasRelatedWork W2748952813 @default.
- W1996656102 hasRelatedWork W2899084033 @default.
- W1996656102 hasRelatedWork W2902546961 @default.
- W1996656102 hasRelatedWork W3127524829 @default.
- W1996656102 hasVolume "21" @default.
- W1996656102 isParatext "false" @default.
- W1996656102 isRetracted "false" @default.
- W1996656102 magId "1996656102" @default.
- W1996656102 workType "article" @default.