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- W1996742010 abstract "The VLSI era will require increased Active Electronic Gate (AEG) density and reduced IC leakage current. The fabrication of circuits to achieve these ends, however, is often accompanied by process-induced defects which degrade the desired circuit characteristics. This brief review will highlight the influence of several point, line and surface defects on the fabrication and electrical characteristics of devices/IC's. Several examples of bulk defect gettering and lithographic processes resulting in unique device/IC configurations to reduce these deleterious effects will then be described." @default.
- W1996742010 created "2016-06-24" @default.
- W1996742010 creator A5060203468 @default.
- W1996742010 date "1984-05-31" @default.
- W1996742010 modified "2023-09-23" @default.
- W1996742010 title "Silicon Material Phenomena In VLSI Circuit Processing" @default.
- W1996742010 doi "https://doi.org/10.1117/12.941338" @default.
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