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- W1996819786 abstract "It was demonstrated that GaN growth rate by MOVPE depended on the reactor pressure, inclined angle of slanted susceptor, and the temperature gradient over substrate in the vertical direction, which were contributed to the thermal convection in gas-phase. The growth process was controlled by mass transported limited, that can be classified into the input rate limited and the diffusion limited, or their combination depending on the configuration of reactor and the experimental conditions." @default.
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- W1996819786 date "1997-04-01" @default.
- W1996819786 modified "2023-10-15" @default.
- W1996819786 title "Effects of thermal convection on growth rate of GaN by MOVPE" @default.
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- W1996819786 doi "https://doi.org/10.1016/s0038-1098(96)00771-5" @default.
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