FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1996835907> ?p ?o ?g. }

• W1996835907 endingPage "127" @default.
• W1996835907 startingPage "119" @default.
• W1996835907 abstract "The application of particle beams for the formation of thin films can be divided into primary beam deposition by low-energy particles, bombardment-induced material transfer from a target to a substrate, and beam-assisted film production by particle bombardment of the substrate during film growth. Corresponding techniques are discussed and illustrated by pratical examples." @default.
• W1996835907 created "2016-06-24" @default.
• W1996835907 creator A5049496661 @default.
• W1996835907 date "1989-08-01" @default.
• W1996835907 modified "2023-10-16" @default.
• W1996835907 title "Ion and plasma beam assisted thin film deposition" @default.
• W1996835907 cites W1968761962 @default.
• W1996835907 cites W1979207330 @default.
• W1996835907 cites W1979927049 @default.
• W1996835907 cites W1993438262 @default.
• W1996835907 cites W1996710743 @default.
• W1996835907 cites W1998079263 @default.
• W1996835907 cites W1998937670 @default.
• W1996835907 cites W2004290133 @default.
• W1996835907 cites W2012058978 @default.
• W1996835907 cites W2015795944 @default.
• W1996835907 cites W2025384136 @default.
• W1996835907 cites W2026241489 @default.
• W1996835907 cites W2034953934 @default.
• W1996835907 cites W2039582123 @default.
• W1996835907 cites W2045573119 @default.
• W1996835907 cites W2047657412 @default.
• W1996835907 cites W2067838054 @default.
• W1996835907 cites W2068886108 @default.
• W1996835907 cites W2077528868 @default.
• W1996835907 cites W2086288341 @default.
• W1996835907 cites W2086826156 @default.
• W1996835907 cites W2086860957 @default.
• W1996835907 doi "https://doi.org/10.1016/0040-6090(89)90818-3" @default.
• W1996835907 hasPublicationYear "1989" @default.
• W1996835907 type Work @default.
• W1996835907 sameAs 1996835907 @default.
• W1996835907 citedByCount "16" @default.
• W1996835907 countsByYear W19968359072014 @default.
• W1996835907 countsByYear W19968359072020 @default.
• W1996835907 crossrefType "journal-article" @default.
• W1996835907 hasAuthorship W1996835907A5049496661 @default.
• W1996835907 hasConcept C111368507 @default.
• W1996835907 hasConcept C118442862 @default.
• W1996835907 hasConcept C120665830 @default.
• W1996835907 hasConcept C121332964 @default.
• W1996835907 hasConcept C127313418 @default.
• W1996835907 hasConcept C145148216 @default.
• W1996835907 hasConcept C151730666 @default.
• W1996835907 hasConcept C168834538 @default.
• W1996835907 hasConcept C171250308 @default.
• W1996835907 hasConcept C178790620 @default.
• W1996835907 hasConcept C185544564 @default.
• W1996835907 hasConcept C185592680 @default.
• W1996835907 hasConcept C19067145 @default.
• W1996835907 hasConcept C192562407 @default.
• W1996835907 hasConcept C2777289219 @default.
• W1996835907 hasConcept C2778517922 @default.
• W1996835907 hasConcept C2816523 @default.
• W1996835907 hasConcept C31190367 @default.
• W1996835907 hasConcept C50774322 @default.
• W1996835907 hasConcept C64297162 @default.
• W1996835907 hasConcept C82706917 @default.
• W1996835907 hasConcept C86803240 @default.
• W1996835907 hasConcept C93106096 @default.
• W1996835907 hasConceptScore W1996835907C111368507 @default.
• W1996835907 hasConceptScore W1996835907C118442862 @default.
• W1996835907 hasConceptScore W1996835907C120665830 @default.
• W1996835907 hasConceptScore W1996835907C121332964 @default.
• W1996835907 hasConceptScore W1996835907C127313418 @default.
• W1996835907 hasConceptScore W1996835907C145148216 @default.
• W1996835907 hasConceptScore W1996835907C151730666 @default.
• W1996835907 hasConceptScore W1996835907C168834538 @default.
• W1996835907 hasConceptScore W1996835907C171250308 @default.
• W1996835907 hasConceptScore W1996835907C178790620 @default.
• W1996835907 hasConceptScore W1996835907C185544564 @default.
• W1996835907 hasConceptScore W1996835907C185592680 @default.
• W1996835907 hasConceptScore W1996835907C19067145 @default.
• W1996835907 hasConceptScore W1996835907C192562407 @default.
• W1996835907 hasConceptScore W1996835907C2777289219 @default.
• W1996835907 hasConceptScore W1996835907C2778517922 @default.
• W1996835907 hasConceptScore W1996835907C2816523 @default.
• W1996835907 hasConceptScore W1996835907C31190367 @default.
• W1996835907 hasConceptScore W1996835907C50774322 @default.
• W1996835907 hasConceptScore W1996835907C64297162 @default.
• W1996835907 hasConceptScore W1996835907C82706917 @default.
• W1996835907 hasConceptScore W1996835907C86803240 @default.
• W1996835907 hasConceptScore W1996835907C93106096 @default.
• W1996835907 hasLocation W19968359071 @default.
• W1996835907 hasOpenAccess W1996835907 @default.
• W1996835907 hasPrimaryLocation W19968359071 @default.
• W1996835907 hasRelatedWork W1030059253 @default.
• W1996835907 hasRelatedWork W1566961201 @default.
• W1996835907 hasRelatedWork W1978718058 @default.
• W1996835907 hasRelatedWork W1997002596 @default.
• W1996835907 hasRelatedWork W2015795944 @default.
• W1996835907 hasRelatedWork W203961977 @default.
• W1996835907 hasRelatedWork W2133076232 @default.
• W1996835907 hasRelatedWork W2325131937 @default.
• W1996835907 hasRelatedWork W2605166141 @default.
• W1996835907 hasRelatedWork W2132219547 @default.
• W1996835907 hasVolume "175" @default.
• W1996835907 isParatext "false" @default.

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