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- W1997048319 abstract "A new pressure-activated silicon micromachined poppet valve design and fabrication process are presented for automotive fuel applications. Although non-electrically activated, micromachining provides a physical structure which is difficult or expensive to achieve with conventional method machined parts. Bulk etching is used to fabricate an octagonal silicon diaphragm which moves in response to the inlet fluid pressure. Silicon direct bonding is used to combine two layers, one with an inlet flow chamber and valve boss, and a second with a movable diaphragm and valve seat. The outlet side of the diaphragm includes a spring locator to position a counter-force mechanical spring. The diaphragm's burst pressure is reduced and varies greatly depending on the alignment of the clamping edges above and below the diaphragm." @default.
- W1997048319 created "2016-06-24" @default.
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- W1997048319 date "1996-09-23" @default.
- W1997048319 modified "2023-09-27" @default.
- W1997048319 title "<title>Silicon-micromachined poppet valve with an octagonal diaphragm</title>" @default.
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- W1997048319 doi "https://doi.org/10.1117/12.251209" @default.
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