FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1997076278> ?p ?o ?g. }

• W1997076278 abstract "Abstract Thin silicon oxynitride (SiO x N y ) films were synthesised without substrate heating by means of N 2 + ion-beam sputtering of a silicon nitride target at an energy of 1000 eV in a N 2 and O 2 ambient with and without 200 eV N 2 + ion assistance. Unassisted films were deposited in a controlled O 2 partial pressure ranging from ambient to 5.0 × 10 −3 Pa whereas assisted films were deposited at a fixed O 2 partial pressure of 1.0 × 10 −3 Pa. The O/(O+N) atomic fraction and the SiO x N y asymmetric stretch mode IR absorption peak wavenumber of unassisted films increased almost linearly with increasing O 2 partial pressure, from 0.2 to 1.0 and 860 cm −1 to 1050 cm −1 , respectively, while their refractive indices decreased from 1.92 to 1.46. The behaviour of the SiO x N y film refractive index with the SiO 2 fraction has been compared to that predicted by Drude, Lorentz-Lorenz and Bruggeman models under the assumption that the film is a mixture of SiO 2 and Si 3 N 4 phases. For a fixed O 2 partial pressure, the O content of the N 2 + ion-assisted films increased with an increase in the N + ion to Si atom arrival ratio from 0 to 3. This increase in O content correlate with changes in the film refractive index and SiO x N y asymmetric stretch mode absorption peak position, from 1.56 to 1.43 and 1014 cm −1 to 1054 cm −1 , respectively, indicating that the O/N atomic ratio increases with increasing N + ion to Si atom ratio until film properties consistent with stoichiometric SiO 2 are obtained." @default.
• W1997076278 created "2016-06-24" @default.
• W1997076278 creator A5034282422 @default.
• W1997076278 creator A5064776430 @default.
• W1997076278 creator A5085788712 @default.
• W1997076278 date "1997-05-01" @default.
• W1997076278 modified "2023-09-27" @default.
• W1997076278 title "Synthesis of silicon oxynitride by ion beam sputtering and the effects of nitrogen ion-assisted bombardment" @default.
• W1997076278 cites W1623611047 @default.
• W1997076278 cites W1969975323 @default.
• W1997076278 cites W1988639161 @default.
• W1997076278 cites W1990932573 @default.
• W1997076278 cites W2019664573 @default.
• W1997076278 cites W2022440027 @default.
• W1997076278 cites W2049033610 @default.
• W1997076278 cites W2055593121 @default.
• W1997076278 cites W2069498677 @default.
• W1997076278 cites W2091584470 @default.
• W1997076278 cites W2132346921 @default.
• W1997076278 cites W2162123284 @default.
• W1997076278 cites W577018266 @default.
• W1997076278 cites W2108286042 @default.
• W1997076278 doi "https://doi.org/10.1016/s0168-583x(96)00959-7" @default.
• W1997076278 hasPublicationYear "1997" @default.
• W1997076278 type Work @default.
• W1997076278 sameAs 1997076278 @default.
• W1997076278 citedByCount "6" @default.
• W1997076278 countsByYear W19970762782013 @default.
• W1997076278 crossrefType "journal-article" @default.
• W1997076278 hasAuthorship W1997076278A5034282422 @default.
• W1997076278 hasAuthorship W1997076278A5064776430 @default.
• W1997076278 hasAuthorship W1997076278A5085788712 @default.
• W1997076278 hasConcept C113196181 @default.
• W1997076278 hasConcept C125287762 @default.
• W1997076278 hasConcept C145148216 @default.
• W1997076278 hasConcept C159985019 @default.
• W1997076278 hasConcept C171250308 @default.
• W1997076278 hasConcept C178790620 @default.
• W1997076278 hasConcept C185592680 @default.
• W1997076278 hasConcept C19067145 @default.
• W1997076278 hasConcept C191897082 @default.
• W1997076278 hasConcept C192562407 @default.
• W1997076278 hasConcept C194760766 @default.
• W1997076278 hasConcept C22423302 @default.
• W1997076278 hasConcept C2777431650 @default.
• W1997076278 hasConcept C2779227376 @default.
• W1997076278 hasConcept C2779476251 @default.
• W1997076278 hasConcept C42067758 @default.
• W1997076278 hasConcept C43617362 @default.
• W1997076278 hasConcept C49040817 @default.
• W1997076278 hasConcept C50774322 @default.
• W1997076278 hasConcept C540031477 @default.
• W1997076278 hasConcept C544956773 @default.
• W1997076278 hasConcept C68463220 @default.
• W1997076278 hasConceptScore W1997076278C113196181 @default.
• W1997076278 hasConceptScore W1997076278C125287762 @default.
• W1997076278 hasConceptScore W1997076278C145148216 @default.
• W1997076278 hasConceptScore W1997076278C159985019 @default.
• W1997076278 hasConceptScore W1997076278C171250308 @default.
• W1997076278 hasConceptScore W1997076278C178790620 @default.
• W1997076278 hasConceptScore W1997076278C185592680 @default.
• W1997076278 hasConceptScore W1997076278C19067145 @default.
• W1997076278 hasConceptScore W1997076278C191897082 @default.
• W1997076278 hasConceptScore W1997076278C192562407 @default.
• W1997076278 hasConceptScore W1997076278C194760766 @default.
• W1997076278 hasConceptScore W1997076278C22423302 @default.
• W1997076278 hasConceptScore W1997076278C2777431650 @default.
• W1997076278 hasConceptScore W1997076278C2779227376 @default.
• W1997076278 hasConceptScore W1997076278C2779476251 @default.
• W1997076278 hasConceptScore W1997076278C42067758 @default.
• W1997076278 hasConceptScore W1997076278C43617362 @default.
• W1997076278 hasConceptScore W1997076278C49040817 @default.
• W1997076278 hasConceptScore W1997076278C50774322 @default.
• W1997076278 hasConceptScore W1997076278C540031477 @default.
• W1997076278 hasConceptScore W1997076278C544956773 @default.
• W1997076278 hasConceptScore W1997076278C68463220 @default.
• W1997076278 hasLocation W19970762781 @default.
• W1997076278 hasOpenAccess W1997076278 @default.
• W1997076278 hasPrimaryLocation W19970762781 @default.
• W1997076278 hasRelatedWork W1802765991 @default.
• W1997076278 hasRelatedWork W1981187100 @default.
• W1997076278 hasRelatedWork W1986842037 @default.
• W1997076278 hasRelatedWork W1988217292 @default.
• W1997076278 hasRelatedWork W1994363803 @default.
• W1997076278 hasRelatedWork W2004225736 @default.
• W1997076278 hasRelatedWork W2018654412 @default.
• W1997076278 hasRelatedWork W2023914256 @default.
• W1997076278 hasRelatedWork W2044446705 @default.
• W1997076278 hasRelatedWork W2046520506 @default.
• W1997076278 hasRelatedWork W2047727338 @default.
• W1997076278 hasRelatedWork W2053302966 @default.
• W1997076278 hasRelatedWork W2055649553 @default.
• W1997076278 hasRelatedWork W2068973989 @default.
• W1997076278 hasRelatedWork W2111094154 @default.
• W1997076278 hasRelatedWork W2136087279 @default.
• W1997076278 hasRelatedWork W2170813925 @default.
• W1997076278 hasRelatedWork W2339294249 @default.
• W1997076278 hasRelatedWork W3198787668 @default.
• W1997076278 hasRelatedWork W2469681200 @default.
• W1997076278 isParatext "false" @default.

• next