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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1997134940> ?p ?o ?g. }

• W1997134940 abstract "We demonstrate a very-low temperature cleaning technique based on atomic hydrogen irradiation for highly (1%) tensile strained Ge epilayers grown on metastable, partially strain relaxed GeSn buffer layers. Atomic hydrogen is obtained by catalytic cracking of hydrogen gas on a hot tungsten filament in an ultra-high vacuum chamber. X-ray photoemission spectroscopy, reflection high energy electron spectroscopy, atomic force microscopy, secondary ion mass spectroscopy, and micro-Raman showed that an O- and C-free Ge surface was achieved, while maintaining the same roughness and strain condition of the as-deposited sample and without any Sn segregation, at a process temperature in the 100–300 °C range." @default.
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• W1997134940 date "2015-01-26" @default.
• W1997134940 modified "2023-10-01" @default.
• W1997134940 title "Epi-cleaning of Ge/GeSn heterostructures" @default.
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• W1997134940 doi "https://doi.org/10.1063/1.4906616" @default.
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