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- W1997188049 abstract "For Lens that will be used in photo lithography systems, not only Low Spatial Frequency (LSF) errors, but alsoMiddle and High Spatial Frequency (M/HSF) errors should be corrected to very low level. Ion Beam Figuring (IBF) isbelieved to be one of the most effective ways that can fabricate lens to especially high surface accuracy; In fact, it hasalso certain effects on removing errors in higher spatial frequency range. Firstly, the principle of IBF was introduced;Then, Power Spectral Density (PSD) is introduced, which is used to evaluate IBF’s corrective effects on errors indifferent spatial frequency ranges; Finally, by the use of IBF machine, a convex lens with diameter 90mm wasfabricated, and its surface error was improved from PVr value15nm to less than 10nm, measured by Fizeau phase shiftinterferometer precisely. Also, M/HSF errors were measured before and after IBF fabrication, by White LightInterferometer and Atom Force Microscope separately. The initial and final Power Spectrum Density (PSD) curves of thelens were generated and compared with each other, which shows that IBF technic has really good ability to remove LSFerrors, and can also reduce M/HSF errors greatly in the meantime. The results help to evaluate the corrective effects ofIBF technic on errors in the full spatial frequency range." @default.
- W1997188049 created "2016-06-24" @default.
- W1997188049 creator A5039156285 @default.
- W1997188049 date "2012-10-16" @default.
- W1997188049 modified "2023-09-23" @default.
- W1997188049 title "Correction of full spatial frequency errors with ion beam figuring" @default.
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- W1997188049 doi "https://doi.org/10.1117/12.977840" @default.
- W1997188049 hasPublicationYear "2012" @default.
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