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- W1997337564 endingPage "3272" @default.
- W1997337564 startingPage "3269" @default.
- W1997337564 abstract "Improvements of the Fourier transform phase-modulated ellipsometry (FTPME) technique are described. Measurements performed on the silicon oxide-silicon wafer system are used to illustrate FTPME performances. In particular, the chemistry of Si(100) and Si(111) surfaces after hydrofluoric acid (HF) treatment is investigated. Precisions on the ellipsometric angles Ψ and Δ of ±0.003° and ±0.008°, respectively, are obtained in the SiHn stretching mode region. SiH and SiH2 vibrations are identified at the Si surface revealing that submonolayer sensitivity can be achieved with FTPME. As a consequence, FTPME appears as a promising technique to perform detailed studies of interface formation and thin-film growth." @default.
- W1997337564 created "2016-06-24" @default.
- W1997337564 creator A5052340419 @default.
- W1997337564 creator A5067440332 @default.
- W1997337564 creator A5074514354 @default.
- W1997337564 date "1995-05-01" @default.
- W1997337564 modified "2023-09-25" @default.
- W1997337564 title "Improvements of Fourier transform phase‐modulated ellipsometry" @default.
- W1997337564 cites W1982488675 @default.
- W1997337564 cites W2017836716 @default.
- W1997337564 cites W2031322080 @default.
- W1997337564 cites W2035974690 @default.
- W1997337564 cites W2045690767 @default.
- W1997337564 cites W2062076539 @default.
- W1997337564 cites W2073093185 @default.
- W1997337564 cites W2164588182 @default.
- W1997337564 doi "https://doi.org/10.1063/1.1145492" @default.
- W1997337564 hasPublicationYear "1995" @default.
- W1997337564 type Work @default.
- W1997337564 sameAs 1997337564 @default.
- W1997337564 citedByCount "23" @default.
- W1997337564 countsByYear W19973375642017 @default.
- W1997337564 crossrefType "journal-article" @default.
- W1997337564 hasAuthorship W1997337564A5052340419 @default.
- W1997337564 hasAuthorship W1997337564A5067440332 @default.
- W1997337564 hasAuthorship W1997337564A5074514354 @default.
- W1997337564 hasConcept C102519508 @default.
- W1997337564 hasConcept C113196181 @default.
- W1997337564 hasConcept C11413529 @default.
- W1997337564 hasConcept C120665830 @default.
- W1997337564 hasConcept C121332964 @default.
- W1997337564 hasConcept C160671074 @default.
- W1997337564 hasConcept C160892712 @default.
- W1997337564 hasConcept C171250308 @default.
- W1997337564 hasConcept C178790620 @default.
- W1997337564 hasConcept C18293161 @default.
- W1997337564 hasConcept C185592680 @default.
- W1997337564 hasConcept C19067145 @default.
- W1997337564 hasConcept C191897082 @default.
- W1997337564 hasConcept C192562407 @default.
- W1997337564 hasConcept C2776967294 @default.
- W1997337564 hasConcept C2777431650 @default.
- W1997337564 hasConcept C2779105228 @default.
- W1997337564 hasConcept C2779851234 @default.
- W1997337564 hasConcept C41008148 @default.
- W1997337564 hasConcept C41610221 @default.
- W1997337564 hasConcept C44280652 @default.
- W1997337564 hasConcept C49040817 @default.
- W1997337564 hasConcept C544956773 @default.
- W1997337564 hasConcept C62520636 @default.
- W1997337564 hasConcept C75172450 @default.
- W1997337564 hasConceptScore W1997337564C102519508 @default.
- W1997337564 hasConceptScore W1997337564C113196181 @default.
- W1997337564 hasConceptScore W1997337564C11413529 @default.
- W1997337564 hasConceptScore W1997337564C120665830 @default.
- W1997337564 hasConceptScore W1997337564C121332964 @default.
- W1997337564 hasConceptScore W1997337564C160671074 @default.
- W1997337564 hasConceptScore W1997337564C160892712 @default.
- W1997337564 hasConceptScore W1997337564C171250308 @default.
- W1997337564 hasConceptScore W1997337564C178790620 @default.
- W1997337564 hasConceptScore W1997337564C18293161 @default.
- W1997337564 hasConceptScore W1997337564C185592680 @default.
- W1997337564 hasConceptScore W1997337564C19067145 @default.
- W1997337564 hasConceptScore W1997337564C191897082 @default.
- W1997337564 hasConceptScore W1997337564C192562407 @default.
- W1997337564 hasConceptScore W1997337564C2776967294 @default.
- W1997337564 hasConceptScore W1997337564C2777431650 @default.
- W1997337564 hasConceptScore W1997337564C2779105228 @default.
- W1997337564 hasConceptScore W1997337564C2779851234 @default.
- W1997337564 hasConceptScore W1997337564C41008148 @default.
- W1997337564 hasConceptScore W1997337564C41610221 @default.
- W1997337564 hasConceptScore W1997337564C44280652 @default.
- W1997337564 hasConceptScore W1997337564C49040817 @default.
- W1997337564 hasConceptScore W1997337564C544956773 @default.
- W1997337564 hasConceptScore W1997337564C62520636 @default.
- W1997337564 hasConceptScore W1997337564C75172450 @default.
- W1997337564 hasIssue "5" @default.
- W1997337564 hasLocation W19973375641 @default.
- W1997337564 hasOpenAccess W1997337564 @default.
- W1997337564 hasPrimaryLocation W19973375641 @default.
- W1997337564 hasRelatedWork W1985771745 @default.
- W1997337564 hasRelatedWork W1991237093 @default.
- W1997337564 hasRelatedWork W1997337564 @default.
- W1997337564 hasRelatedWork W2034918999 @default.
- W1997337564 hasRelatedWork W2085488502 @default.
- W1997337564 hasRelatedWork W2171106615 @default.
- W1997337564 hasRelatedWork W2258185924 @default.
- W1997337564 hasRelatedWork W2781886551 @default.
- W1997337564 hasRelatedWork W3116659289 @default.
- W1997337564 hasRelatedWork W343114265 @default.
- W1997337564 hasVolume "66" @default.
- W1997337564 isParatext "false" @default.
- W1997337564 isRetracted "false" @default.
- W1997337564 magId "1997337564" @default.
- W1997337564 workType "article" @default.