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- W1997400581 abstract "Silicon carbide (SiC) power devices have received much attention in recent years because they enable the fabrication of devices with a low power consumption. To reduce the on-resistance in vertical power transistors, backside thinning is required after device processing. However, it is difficult to thin a SiC wafer with a high removal rate by conventional mechanical machining because its high hardness and brittleness cause cracking and chipping during thinning. We have attempted to thin a SiC wafer by plasma chemical vaporization machining (PCVM), which is plasma etching using atmospheric-pressure plasma. In this paper, we describe a machining property using a newly developed flat-bar electrode with multiple gas nozzles for thinning a SiC wafer." @default.
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- W1997400581 date "2012-04-01" @default.
- W1997400581 modified "2023-09-23" @default.
- W1997400581 title "Plasma Chemical Vaporization Machining of Silicon Carbide Wafer Using Flat-Bar Electrode with Multiple Gas Nozzles" @default.
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- W1997400581 doi "https://doi.org/10.4028/www.scientific.net/amr.497.160" @default.
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