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- W1997412461 abstract "ABSTRACTIn this paper we present the design and characterization of a micro 4f optical imaging system for thepurpose of characterizing mesoscopic diffractive optical elements. To this end, we demonstrate the systems' ability to measure very small variations in diffraction intensity with high resolution. Because thesystem is illuminated by both coherent and incoherent sources, we characterize the cutoff frequency andmodulation transfer function to determine the spatial resolution of the system. The system is validated bycomparing measured results to theoretical predictions. 1. INTRODUCTION In recent years, the ability to fabricate optical devices on both the micro and nanometer scales has become widespread and, to some extent, even commercially available. During this time, significant advanceshave also occurred in the ability to design such small-scale devices [1]. However, what is currently lacking is the ability to characterize these devices and, to this end, compare the designed performance to" @default.
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- W1997412461 date "2001-11-13" @default.
- W1997412461 modified "2023-09-26" @default.
- W1997412461 title "<title>Integrated micro 4f-optical imaging system for the characteriztion of mesoscopic DOEs</title>" @default.
- W1997412461 doi "https://doi.org/10.1117/12.448155" @default.
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