FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1997424102> ?p ?o ?g. }

• W1997424102 endingPage "7777" @default.
• W1997424102 startingPage "7777" @default.
• W1997424102 abstract "We used ultrathin SiO 2 layers less than 1 nm thick for nanofabrication. In this method, nanometer-scale patterning onto the oxide layers was achieved by electron-beam (EB)-irradiation and subsequent thermal heating (EB-induced selective thermal decomposition). We examined the delineation mechanism by using scanning reflection electron microscopy (SREM), and Auger electron and X-ray photoelectron spectroscopy (AES and XPS). We found that the change in the oxide layer composition caused by electron-stimulated oxygen desorption (ESD) from the oxide layers accounted for the selective thermal decomposition, by which nanometer-scale voids were densely generated." @default.
• W1997424102 created "2016-06-24" @default.
• W1997424102 creator A5000177152 @default.
• W1997424102 creator A5029596690 @default.
• W1997424102 creator A5033375834 @default.
• W1997424102 creator A5033578917 @default.
• W1997424102 creator A5064035172 @default.
• W1997424102 date "1997-12-01" @default.
• W1997424102 modified "2023-09-25" @default.
• W1997424102 title "Electron-Beam-Induced Selective Thermal Decomposition of Ultrathin SiO₂ Layers Used in Nanofabrication" @default.
• W1997424102 cites W1483960631 @default.
• W1997424102 cites W1671323197 @default.
• W1997424102 cites W1972252391 @default.
• W1997424102 cites W1982239028 @default.
• W1997424102 cites W1984524120 @default.
• W1997424102 cites W1985249245 @default.
• W1997424102 cites W1989003107 @default.
• W1997424102 cites W1989992503 @default.
• W1997424102 cites W1997437859 @default.
• W1997424102 cites W2005475673 @default.
• W1997424102 cites W2019081911 @default.
• W1997424102 cites W2030953125 @default.
• W1997424102 cites W2032168860 @default.
• W1997424102 cites W2051961140 @default.
• W1997424102 cites W2092382055 @default.
• W1997424102 cites W2093657788 @default.
• W1997424102 cites W2094541793 @default.
• W1997424102 cites W4245811251 @default.
• W1997424102 doi "https://doi.org/10.1143/jjap.36.7777" @default.
• W1997424102 hasPublicationYear "1997" @default.
• W1997424102 type Work @default.
• W1997424102 sameAs 1997424102 @default.
• W1997424102 citedByCount "19" @default.
• W1997424102 countsByYear W19974241022019 @default.
• W1997424102 countsByYear W19974241022020 @default.
• W1997424102 crossrefType "journal-article" @default.
• W1997424102 hasAuthorship W1997424102A5000177152 @default.
• W1997424102 hasAuthorship W1997424102A5029596690 @default.
• W1997424102 hasAuthorship W1997424102A5033375834 @default.
• W1997424102 hasAuthorship W1997424102A5033578917 @default.
• W1997424102 hasAuthorship W1997424102A5064035172 @default.
• W1997424102 hasConcept C113196181 @default.
• W1997424102 hasConcept C121332964 @default.
• W1997424102 hasConcept C127413603 @default.
• W1997424102 hasConcept C136525101 @default.
• W1997424102 hasConcept C142724271 @default.
• W1997424102 hasConcept C147120987 @default.
• W1997424102 hasConcept C147789679 @default.
• W1997424102 hasConcept C150394285 @default.
• W1997424102 hasConcept C159985019 @default.
• W1997424102 hasConcept C160434732 @default.
• W1997424102 hasConcept C162117346 @default.
• W1997424102 hasConcept C162711632 @default.
• W1997424102 hasConcept C175708663 @default.
• W1997424102 hasConcept C178790620 @default.
• W1997424102 hasConcept C185544564 @default.
• W1997424102 hasConcept C185592680 @default.
• W1997424102 hasConcept C191897082 @default.
• W1997424102 hasConcept C192562407 @default.
• W1997424102 hasConcept C204787440 @default.
• W1997424102 hasConcept C25442681 @default.
• W1997424102 hasConcept C26771246 @default.
• W1997424102 hasConcept C2779851234 @default.
• W1997424102 hasConcept C2781059571 @default.
• W1997424102 hasConcept C42360764 @default.
• W1997424102 hasConcept C43617362 @default.
• W1997424102 hasConcept C62520636 @default.
• W1997424102 hasConcept C71924100 @default.
• W1997424102 hasConcept C77066764 @default.
• W1997424102 hasConcept C95312477 @default.
• W1997424102 hasConceptScore W1997424102C113196181 @default.
• W1997424102 hasConceptScore W1997424102C121332964 @default.
• W1997424102 hasConceptScore W1997424102C127413603 @default.
• W1997424102 hasConceptScore W1997424102C136525101 @default.
• W1997424102 hasConceptScore W1997424102C142724271 @default.
• W1997424102 hasConceptScore W1997424102C147120987 @default.
• W1997424102 hasConceptScore W1997424102C147789679 @default.
• W1997424102 hasConceptScore W1997424102C150394285 @default.
• W1997424102 hasConceptScore W1997424102C159985019 @default.
• W1997424102 hasConceptScore W1997424102C160434732 @default.
• W1997424102 hasConceptScore W1997424102C162117346 @default.
• W1997424102 hasConceptScore W1997424102C162711632 @default.
• W1997424102 hasConceptScore W1997424102C175708663 @default.
• W1997424102 hasConceptScore W1997424102C178790620 @default.
• W1997424102 hasConceptScore W1997424102C185544564 @default.
• W1997424102 hasConceptScore W1997424102C185592680 @default.
• W1997424102 hasConceptScore W1997424102C191897082 @default.
• W1997424102 hasConceptScore W1997424102C192562407 @default.
• W1997424102 hasConceptScore W1997424102C204787440 @default.
• W1997424102 hasConceptScore W1997424102C25442681 @default.
• W1997424102 hasConceptScore W1997424102C26771246 @default.
• W1997424102 hasConceptScore W1997424102C2779851234 @default.
• W1997424102 hasConceptScore W1997424102C2781059571 @default.
• W1997424102 hasConceptScore W1997424102C42360764 @default.
• W1997424102 hasConceptScore W1997424102C43617362 @default.
• W1997424102 hasConceptScore W1997424102C62520636 @default.
• W1997424102 hasConceptScore W1997424102C71924100 @default.
• W1997424102 hasConceptScore W1997424102C77066764 @default.

• next