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- W1997427234 endingPage "351" @default.
- W1997427234 startingPage "346" @default.
- W1997427234 abstract "Resonant force sensors are devices which convert axially applied forces to changes in resonant frequency. These structures are fundamentally wires or beams or more complicated structures which are in a vacuum envelope. They become interesting and useful if they can be miniaturized, can be fabricated from a single material in a cost effective manner and can be excited and read via simple techniques. The devices which are reported here satisfy most of the above criteria. The construction material involves a silicon substrate, tensile strain polysilicon films and strain-compensated silicon nitride deposits. Clamped-clamped beams of polysilicon, typically 400,μm long, 40,μm wide and 2μm thick are fabricated with an isoplanar process over an oxide filled tub. Low-pressure chemical-vapor-deposited (LPCVD) nitride is used as a second sacrificial layer which also serves to support a second polysilicon layer which is part of the vacuum envelope. Internal surface adhesion problems are avoided by freeze-sublimation procedures which remove surface tension-induced beam deflections. Passivation and sealing is accomplished via LPCVD nitride and reactive sealing. Excitation and sensing is accomplished via ion implanted resistors. Experimental results always produce quality factors, Q, above 35 000. Resonant frequencies to 750 kHz have been achieved. It is estimated that these devices can measure axially applied forces below 0.1 dyne with standard electronic interfaces." @default.
- W1997427234 created "2016-06-24" @default.
- W1997427234 creator A5001845331 @default.
- W1997427234 creator A5029323806 @default.
- W1997427234 creator A5037112507 @default.
- W1997427234 creator A5055706070 @default.
- W1997427234 date "1990-02-01" @default.
- W1997427234 modified "2023-10-06" @default.
- W1997427234 title "The application of fine-grained, tensile polysilicon to mechanicaly resonant transducers" @default.
- W1997427234 cites W2009873478 @default.
- W1997427234 cites W2057347879 @default.
- W1997427234 cites W2143364941 @default.
- W1997427234 doi "https://doi.org/10.1016/0924-4247(90)85069-g" @default.
- W1997427234 hasPublicationYear "1990" @default.
- W1997427234 type Work @default.
- W1997427234 sameAs 1997427234 @default.
- W1997427234 citedByCount "126" @default.
- W1997427234 countsByYear W19974272342012 @default.
- W1997427234 countsByYear W19974272342013 @default.
- W1997427234 countsByYear W19974272342015 @default.
- W1997427234 countsByYear W19974272342016 @default.
- W1997427234 countsByYear W19974272342017 @default.
- W1997427234 countsByYear W19974272342018 @default.
- W1997427234 countsByYear W19974272342021 @default.
- W1997427234 countsByYear W19974272342022 @default.
- W1997427234 countsByYear W19974272342023 @default.
- W1997427234 crossrefType "journal-article" @default.
- W1997427234 hasAuthorship W1997427234A5001845331 @default.
- W1997427234 hasAuthorship W1997427234A5029323806 @default.
- W1997427234 hasAuthorship W1997427234A5037112507 @default.
- W1997427234 hasAuthorship W1997427234A5055706070 @default.
- W1997427234 hasConcept C111368507 @default.
- W1997427234 hasConcept C127313418 @default.
- W1997427234 hasConcept C136525101 @default.
- W1997427234 hasConcept C142724271 @default.
- W1997427234 hasConcept C145667562 @default.
- W1997427234 hasConcept C15744967 @default.
- W1997427234 hasConcept C159985019 @default.
- W1997427234 hasConcept C171250308 @default.
- W1997427234 hasConcept C192562407 @default.
- W1997427234 hasConcept C194760766 @default.
- W1997427234 hasConcept C204787440 @default.
- W1997427234 hasConcept C2777289219 @default.
- W1997427234 hasConcept C2777431650 @default.
- W1997427234 hasConcept C2779227376 @default.
- W1997427234 hasConcept C33574316 @default.
- W1997427234 hasConcept C37977207 @default.
- W1997427234 hasConcept C49040817 @default.
- W1997427234 hasConcept C542102704 @default.
- W1997427234 hasConcept C544956773 @default.
- W1997427234 hasConcept C57528182 @default.
- W1997427234 hasConcept C58437636 @default.
- W1997427234 hasConcept C71924100 @default.
- W1997427234 hasConceptScore W1997427234C111368507 @default.
- W1997427234 hasConceptScore W1997427234C127313418 @default.
- W1997427234 hasConceptScore W1997427234C136525101 @default.
- W1997427234 hasConceptScore W1997427234C142724271 @default.
- W1997427234 hasConceptScore W1997427234C145667562 @default.
- W1997427234 hasConceptScore W1997427234C15744967 @default.
- W1997427234 hasConceptScore W1997427234C159985019 @default.
- W1997427234 hasConceptScore W1997427234C171250308 @default.
- W1997427234 hasConceptScore W1997427234C192562407 @default.
- W1997427234 hasConceptScore W1997427234C194760766 @default.
- W1997427234 hasConceptScore W1997427234C204787440 @default.
- W1997427234 hasConceptScore W1997427234C2777289219 @default.
- W1997427234 hasConceptScore W1997427234C2777431650 @default.
- W1997427234 hasConceptScore W1997427234C2779227376 @default.
- W1997427234 hasConceptScore W1997427234C33574316 @default.
- W1997427234 hasConceptScore W1997427234C37977207 @default.
- W1997427234 hasConceptScore W1997427234C49040817 @default.
- W1997427234 hasConceptScore W1997427234C542102704 @default.
- W1997427234 hasConceptScore W1997427234C544956773 @default.
- W1997427234 hasConceptScore W1997427234C57528182 @default.
- W1997427234 hasConceptScore W1997427234C58437636 @default.
- W1997427234 hasConceptScore W1997427234C71924100 @default.
- W1997427234 hasIssue "1-3" @default.
- W1997427234 hasLocation W19974272341 @default.
- W1997427234 hasOpenAccess W1997427234 @default.
- W1997427234 hasPrimaryLocation W19974272341 @default.
- W1997427234 hasRelatedWork W1584171941 @default.
- W1997427234 hasRelatedWork W1998117676 @default.
- W1997427234 hasRelatedWork W2001792619 @default.
- W1997427234 hasRelatedWork W2080938150 @default.
- W1997427234 hasRelatedWork W2089580594 @default.
- W1997427234 hasRelatedWork W2092206813 @default.
- W1997427234 hasRelatedWork W2338840401 @default.
- W1997427234 hasRelatedWork W2492170890 @default.
- W1997427234 hasRelatedWork W4250688100 @default.
- W1997427234 hasRelatedWork W4382983097 @default.
- W1997427234 hasVolume "21" @default.
- W1997427234 isParatext "false" @default.
- W1997427234 isRetracted "false" @default.
- W1997427234 magId "1997427234" @default.
- W1997427234 workType "article" @default.