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- W1997486272 endingPage "2349" @default.
- W1997486272 startingPage "2345" @default.
- W1997486272 abstract "We studied cross‐sectional shape changes of two types of photoresists in postbaking treatment as related to the radius of pattern curvature, thickness, and postbaking temperature. Using a 140°–160°C postbaking treatment, novolak based photoresist patterns (thickness: 3–4 μm) lean and hang over toward the center of the pattern curvature. These phenomena were reflected in the small radius pattern curvature. On the other hand, for the same treatment the cross‐sectional shape of the PMIPK type photoresist (thickness: 2.5–3.5 μm) was symmetric in the curvature. These phenomena were probably caused by the difference in surface tensions between the two types of photoresists. The PMIPK type photoresist was found to be well suited to use in redepositionless mask patterns for ion milling processing." @default.
- W1997486272 created "2016-06-24" @default.
- W1997486272 creator A5002000804 @default.
- W1997486272 creator A5016279116 @default.
- W1997486272 creator A5023320667 @default.
- W1997486272 creator A5044653019 @default.
- W1997486272 creator A5080666755 @default.
- W1997486272 creator A5088640550 @default.
- W1997486272 date "1989-08-01" @default.
- W1997486272 modified "2023-10-14" @default.
- W1997486272 title "Flow Characteristics of Novolak and PMIPK Type Photoresists in Baking Treatment as Related to Pattern Curvature" @default.
- W1997486272 doi "https://doi.org/10.1149/1.2097345" @default.
- W1997486272 hasPublicationYear "1989" @default.
- W1997486272 type Work @default.
- W1997486272 sameAs 1997486272 @default.
- W1997486272 citedByCount "0" @default.
- W1997486272 crossrefType "journal-article" @default.
- W1997486272 hasAuthorship W1997486272A5002000804 @default.
- W1997486272 hasAuthorship W1997486272A5016279116 @default.
- W1997486272 hasAuthorship W1997486272A5023320667 @default.
- W1997486272 hasAuthorship W1997486272A5044653019 @default.
- W1997486272 hasAuthorship W1997486272A5080666755 @default.
- W1997486272 hasAuthorship W1997486272A5088640550 @default.
- W1997486272 hasConcept C121332964 @default.
- W1997486272 hasConcept C134406635 @default.
- W1997486272 hasConcept C159985019 @default.
- W1997486272 hasConcept C192562407 @default.
- W1997486272 hasConcept C195065555 @default.
- W1997486272 hasConcept C2524010 @default.
- W1997486272 hasConcept C2779227376 @default.
- W1997486272 hasConcept C33923547 @default.
- W1997486272 hasConcept C38349280 @default.
- W1997486272 hasConcept C57879066 @default.
- W1997486272 hasConceptScore W1997486272C121332964 @default.
- W1997486272 hasConceptScore W1997486272C134406635 @default.
- W1997486272 hasConceptScore W1997486272C159985019 @default.
- W1997486272 hasConceptScore W1997486272C192562407 @default.
- W1997486272 hasConceptScore W1997486272C195065555 @default.
- W1997486272 hasConceptScore W1997486272C2524010 @default.
- W1997486272 hasConceptScore W1997486272C2779227376 @default.
- W1997486272 hasConceptScore W1997486272C33923547 @default.
- W1997486272 hasConceptScore W1997486272C38349280 @default.
- W1997486272 hasConceptScore W1997486272C57879066 @default.
- W1997486272 hasIssue "8" @default.
- W1997486272 hasLocation W19974862721 @default.
- W1997486272 hasOpenAccess W1997486272 @default.
- W1997486272 hasPrimaryLocation W19974862721 @default.
- W1997486272 hasRelatedWork W1994103032 @default.
- W1997486272 hasRelatedWork W2011052271 @default.
- W1997486272 hasRelatedWork W2051270029 @default.
- W1997486272 hasRelatedWork W2082293200 @default.
- W1997486272 hasRelatedWork W2137307547 @default.
- W1997486272 hasRelatedWork W2366754381 @default.
- W1997486272 hasRelatedWork W2380293314 @default.
- W1997486272 hasRelatedWork W2943188944 @default.
- W1997486272 hasRelatedWork W4285802202 @default.
- W1997486272 hasRelatedWork W4317433637 @default.
- W1997486272 hasVolume "136" @default.
- W1997486272 isParatext "false" @default.
- W1997486272 isRetracted "false" @default.
- W1997486272 magId "1997486272" @default.
- W1997486272 workType "article" @default.