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- W1997545931 abstract "This paper reports fabrication method for out-of-plane coil, which is produced by using combination of planar surface micromachining and post release folding process. Different from conventional planar micro-coil fabrication technology, by using this method, it is possible to obtain large number of turns surrounding a large area in free space. Finally, since polyimide flexible joints are used in the structure, it is possible to change the area in the center of the coil, which results in a change in the inductance value. A large range of inductance value (100–300 nH) can be obtained by changing the angle of erected structure." @default.
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- W1997545931 date "2002-04-01" @default.
- W1997545931 modified "2023-10-04" @default.
- W1997545931 title "Fabrication method for out-of-plane, micro-coil by surface micromachining" @default.
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- W1997545931 doi "https://doi.org/10.1016/s0924-4247(02)00007-9" @default.
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