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- W1997566286 abstract "The popularity of Pulsed Laser Deposition (PLD) as a thin film growth technique has dramatically increased over the last six years and proponents of more mature physical vapor deposition processes are quick to point out the main 'draw-back' of PLD--the apparent difficulty in scaling up the process to areas compatible with commercial applications. To date the main focus of PLD has been on its application to the growth and characterization of epitaxial thin films of a variety of chemical compounds, as well as obtaining an understanding of plume dynamics, while relatively little attention has been paid to the issue of scale-up. However, three basic approaches dealing with scaling-up the thin film growth process of pulsed-laser deposition have been reported in the literature. These include rastering the laser beam over a large area target, translation of the substrate with respect to the ablation plume, and 'off-axis' deposition. Each of these approaches has produced quality thin films of the high temperature superconducting oxides as well as other materials over substrate sizes of at least two-inches in diameter. This paper will compare these three basic approaches, and discuss the advantages and draw backs of each. Issues such as film thickness and composition profiles, reproducibility, deposition rate, substrate heating, and target resurfacing will be addressed. Projections to further scale-up of this physical vapor deposition technique will be presented.© (1993) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
- W1997566286 created "2016-06-24" @default.
- W1997566286 creator A5001225373 @default.
- W1997566286 date "1993-04-19" @default.
- W1997566286 modified "2023-09-23" @default.
- W1997566286 title "<title>Comparison of large-area pulsed-laser deposition approaches</title>" @default.
- W1997566286 cites W1552901919 @default.
- W1997566286 cites W2127678126 @default.
- W1997566286 cites W2319246934 @default.
- W1997566286 cites W2320561897 @default.
- W1997566286 cites W2606246835 @default.
- W1997566286 doi "https://doi.org/10.1117/12.143047" @default.
- W1997566286 hasPublicationYear "1993" @default.
- W1997566286 type Work @default.
- W1997566286 sameAs 1997566286 @default.
- W1997566286 citedByCount "4" @default.
- W1997566286 countsByYear W19975662862013 @default.
- W1997566286 countsByYear W19975662862019 @default.
- W1997566286 crossrefType "proceedings-article" @default.
- W1997566286 hasAuthorship W1997566286A5001225373 @default.
- W1997566286 hasConcept C111368507 @default.
- W1997566286 hasConcept C120665830 @default.
- W1997566286 hasConcept C121332964 @default.
- W1997566286 hasConcept C127313418 @default.
- W1997566286 hasConcept C127413603 @default.
- W1997566286 hasConcept C151730666 @default.
- W1997566286 hasConcept C153294291 @default.
- W1997566286 hasConcept C171250308 @default.
- W1997566286 hasConcept C183866003 @default.
- W1997566286 hasConcept C19067145 @default.
- W1997566286 hasConcept C192562407 @default.
- W1997566286 hasConcept C2524010 @default.
- W1997566286 hasConcept C2775840915 @default.
- W1997566286 hasConcept C2777289219 @default.
- W1997566286 hasConcept C2780841128 @default.
- W1997566286 hasConcept C2816523 @default.
- W1997566286 hasConcept C33923547 @default.
- W1997566286 hasConcept C37982897 @default.
- W1997566286 hasConcept C41008148 @default.
- W1997566286 hasConcept C49040817 @default.
- W1997566286 hasConcept C51576277 @default.
- W1997566286 hasConcept C57410435 @default.
- W1997566286 hasConcept C61696701 @default.
- W1997566286 hasConcept C64297162 @default.
- W1997566286 hasConcept C75937256 @default.
- W1997566286 hasConcept C99844830 @default.
- W1997566286 hasConceptScore W1997566286C111368507 @default.
- W1997566286 hasConceptScore W1997566286C120665830 @default.
- W1997566286 hasConceptScore W1997566286C121332964 @default.
- W1997566286 hasConceptScore W1997566286C127313418 @default.
- W1997566286 hasConceptScore W1997566286C127413603 @default.
- W1997566286 hasConceptScore W1997566286C151730666 @default.
- W1997566286 hasConceptScore W1997566286C153294291 @default.
- W1997566286 hasConceptScore W1997566286C171250308 @default.
- W1997566286 hasConceptScore W1997566286C183866003 @default.
- W1997566286 hasConceptScore W1997566286C19067145 @default.
- W1997566286 hasConceptScore W1997566286C192562407 @default.
- W1997566286 hasConceptScore W1997566286C2524010 @default.
- W1997566286 hasConceptScore W1997566286C2775840915 @default.
- W1997566286 hasConceptScore W1997566286C2777289219 @default.
- W1997566286 hasConceptScore W1997566286C2780841128 @default.
- W1997566286 hasConceptScore W1997566286C2816523 @default.
- W1997566286 hasConceptScore W1997566286C33923547 @default.
- W1997566286 hasConceptScore W1997566286C37982897 @default.
- W1997566286 hasConceptScore W1997566286C41008148 @default.
- W1997566286 hasConceptScore W1997566286C49040817 @default.
- W1997566286 hasConceptScore W1997566286C51576277 @default.
- W1997566286 hasConceptScore W1997566286C57410435 @default.
- W1997566286 hasConceptScore W1997566286C61696701 @default.
- W1997566286 hasConceptScore W1997566286C64297162 @default.
- W1997566286 hasConceptScore W1997566286C75937256 @default.
- W1997566286 hasConceptScore W1997566286C99844830 @default.
- W1997566286 hasLocation W19975662861 @default.
- W1997566286 hasOpenAccess W1997566286 @default.
- W1997566286 hasPrimaryLocation W19975662861 @default.
- W1997566286 hasRelatedWork W1824684299 @default.
- W1997566286 hasRelatedWork W1977294697 @default.
- W1997566286 hasRelatedWork W1989578725 @default.
- W1997566286 hasRelatedWork W2009142635 @default.
- W1997566286 hasRelatedWork W2020778562 @default.
- W1997566286 hasRelatedWork W2021402035 @default.
- W1997566286 hasRelatedWork W2038429188 @default.
- W1997566286 hasRelatedWork W2044251127 @default.
- W1997566286 hasRelatedWork W2072425922 @default.
- W1997566286 hasRelatedWork W2074278957 @default.
- W1997566286 hasRelatedWork W2076734703 @default.
- W1997566286 hasRelatedWork W2136382265 @default.
- W1997566286 hasRelatedWork W2591643851 @default.
- W1997566286 hasRelatedWork W2606646887 @default.
- W1997566286 hasRelatedWork W2940899791 @default.
- W1997566286 hasRelatedWork W2980762665 @default.
- W1997566286 hasRelatedWork W3101284381 @default.
- W1997566286 hasRelatedWork W35543939 @default.
- W1997566286 hasRelatedWork W1953186438 @default.
- W1997566286 hasRelatedWork W2284945547 @default.
- W1997566286 isParatext "false" @default.
- W1997566286 isRetracted "false" @default.
- W1997566286 magId "1997566286" @default.
- W1997566286 workType "article" @default.