Matches in SemOpenAlex for { <https://semopenalex.org/work/W1997577218> ?p ?o ?g. }
Showing items 1 to 64 of
64
with 100 items per page.
- W1997577218 endingPage "3904" @default.
- W1997577218 startingPage "3900" @default.
- W1997577218 abstract "Vacuum ultraviolet (VUV)-light-induced photodegradation of conventional KrF and ArF resists and fluorine-containing polymers for F2 resist was qualitatively studied by reflection absorption infrared spectroscopy. Outgassing from these resists was quantitatively studied by an in situ quartz crystal microbalance (QCM) technique. t-Butoxycarbonyl (BOC), methoxymethyl (MOM), ethoxyethyl (EOE) and t-butyl (BUO) units as a blocking moiety of phenolic OH decomposed on irradiation at 146 nm. The amounts of outgassing from these blocking units decreased in the order EOE > BOC > BUO > MOM. This order was consistent with the order of photodegradability of the resists checked by FT-IR spectroscopy. BOC units attached to hexafluoroisopropanol units photodecomposed faster than BOC units attached to phenolic OH. The amounts of outgassing from t-butyl ester unit and its analogue in conventional ArF resists and fluorine-containing F2 resist were almost the same as that from BOC units in KrF resist." @default.
- W1997577218 created "2016-06-24" @default.
- W1997577218 creator A5022526105 @default.
- W1997577218 creator A5034910678 @default.
- W1997577218 creator A5058364075 @default.
- W1997577218 creator A5086379728 @default.
- W1997577218 date "2003-06-30" @default.
- W1997577218 modified "2023-10-16" @default.
- W1997577218 title "Vacuum Ultraviolet (VUV)-Light-Induced Outgassing from Resist Polymers: A Study Using In Situ Quartz Crystal Microbalance (QCM) Technique" @default.
- W1997577218 doi "https://doi.org/10.1143/jjap.42.3900" @default.
- W1997577218 hasPublicationYear "2003" @default.
- W1997577218 type Work @default.
- W1997577218 sameAs 1997577218 @default.
- W1997577218 citedByCount "2" @default.
- W1997577218 crossrefType "journal-article" @default.
- W1997577218 hasAuthorship W1997577218A5022526105 @default.
- W1997577218 hasAuthorship W1997577218A5034910678 @default.
- W1997577218 hasAuthorship W1997577218A5058364075 @default.
- W1997577218 hasAuthorship W1997577218A5086379728 @default.
- W1997577218 hasConcept C1012414 @default.
- W1997577218 hasConcept C113196181 @default.
- W1997577218 hasConcept C150394285 @default.
- W1997577218 hasConcept C171250308 @default.
- W1997577218 hasConcept C178790620 @default.
- W1997577218 hasConcept C185592680 @default.
- W1997577218 hasConcept C192562407 @default.
- W1997577218 hasConcept C2779227376 @default.
- W1997577218 hasConcept C521977710 @default.
- W1997577218 hasConcept C53524968 @default.
- W1997577218 hasConcept C75473681 @default.
- W1997577218 hasConcept C9996572 @default.
- W1997577218 hasConceptScore W1997577218C1012414 @default.
- W1997577218 hasConceptScore W1997577218C113196181 @default.
- W1997577218 hasConceptScore W1997577218C150394285 @default.
- W1997577218 hasConceptScore W1997577218C171250308 @default.
- W1997577218 hasConceptScore W1997577218C178790620 @default.
- W1997577218 hasConceptScore W1997577218C185592680 @default.
- W1997577218 hasConceptScore W1997577218C192562407 @default.
- W1997577218 hasConceptScore W1997577218C2779227376 @default.
- W1997577218 hasConceptScore W1997577218C521977710 @default.
- W1997577218 hasConceptScore W1997577218C53524968 @default.
- W1997577218 hasConceptScore W1997577218C75473681 @default.
- W1997577218 hasConceptScore W1997577218C9996572 @default.
- W1997577218 hasIssue "Part 1, No. 6B" @default.
- W1997577218 hasLocation W19975772181 @default.
- W1997577218 hasOpenAccess W1997577218 @default.
- W1997577218 hasPrimaryLocation W19975772181 @default.
- W1997577218 hasRelatedWork W1980696646 @default.
- W1997577218 hasRelatedWork W1997532704 @default.
- W1997577218 hasRelatedWork W1998395854 @default.
- W1997577218 hasRelatedWork W2035613217 @default.
- W1997577218 hasRelatedWork W2041677733 @default.
- W1997577218 hasRelatedWork W2055344943 @default.
- W1997577218 hasRelatedWork W2055980527 @default.
- W1997577218 hasRelatedWork W2056240689 @default.
- W1997577218 hasRelatedWork W2073753282 @default.
- W1997577218 hasRelatedWork W4382203837 @default.
- W1997577218 hasVolume "42" @default.
- W1997577218 isParatext "false" @default.
- W1997577218 isRetracted "false" @default.
- W1997577218 magId "1997577218" @default.
- W1997577218 workType "article" @default.