Matches in SemOpenAlex for { <https://semopenalex.org/work/W1997659326> ?p ?o ?g. }
- W1997659326 abstract "Electron beam induced deposition (EBID) and etching (EBIE) are promising methods for the fabrication of three-dimensional nanodevices, wiring of nanostructures, and repair of photolithographic masks. Here, we study simultaneous EBID and EBIE, and demonstrate an athermal electron flux controlled transition between material deposition and etching. The switching is observed when one of the processes has both a higher efficiency and a lower precursor partial pressure than the other. This is demonstrated in two technologically important systems: during XeF2-mediated etching of chrome on a photolithographic mask and during deposition and etching of carbonaceous films on a semiconductor surface. Simultaneous EBID and EBIE can be used to enhance the spatial localization of etch profiles. It plays a key role in reducing contamination buildup rates during low vacuum electron imaging and deposition of high purity nanostructures in the presence of oxygen-containing gases." @default.
- W1997659326 created "2016-06-24" @default.
- W1997659326 creator A5014828257 @default.
- W1997659326 creator A5024673666 @default.
- W1997659326 creator A5081644511 @default.
- W1997659326 creator A5082118838 @default.
- W1997659326 date "2007-03-01" @default.
- W1997659326 modified "2023-10-12" @default.
- W1997659326 title "Electron flux controlled switching between electron beam induced etching and deposition" @default.
- W1997659326 cites W1965908204 @default.
- W1997659326 cites W1968634812 @default.
- W1997659326 cites W1970340540 @default.
- W1997659326 cites W1971522545 @default.
- W1997659326 cites W1976100354 @default.
- W1997659326 cites W1983877224 @default.
- W1997659326 cites W1985597659 @default.
- W1997659326 cites W1986414095 @default.
- W1997659326 cites W1989845802 @default.
- W1997659326 cites W1997407647 @default.
- W1997659326 cites W1998443898 @default.
- W1997659326 cites W1999629320 @default.
- W1997659326 cites W2001157894 @default.
- W1997659326 cites W2001290920 @default.
- W1997659326 cites W2012933113 @default.
- W1997659326 cites W2024334486 @default.
- W1997659326 cites W2026974976 @default.
- W1997659326 cites W2027838421 @default.
- W1997659326 cites W2029026207 @default.
- W1997659326 cites W2029063966 @default.
- W1997659326 cites W2030014577 @default.
- W1997659326 cites W2034762772 @default.
- W1997659326 cites W2038391633 @default.
- W1997659326 cites W2038915875 @default.
- W1997659326 cites W2041930420 @default.
- W1997659326 cites W2044924796 @default.
- W1997659326 cites W2045981793 @default.
- W1997659326 cites W2046015144 @default.
- W1997659326 cites W2047961949 @default.
- W1997659326 cites W2051249115 @default.
- W1997659326 cites W2052430172 @default.
- W1997659326 cites W2053836392 @default.
- W1997659326 cites W2056215116 @default.
- W1997659326 cites W2059075670 @default.
- W1997659326 cites W2061788868 @default.
- W1997659326 cites W2062887854 @default.
- W1997659326 cites W2069334355 @default.
- W1997659326 cites W2069758551 @default.
- W1997659326 cites W2076204567 @default.
- W1997659326 cites W2080886654 @default.
- W1997659326 cites W2081540257 @default.
- W1997659326 cites W2085426090 @default.
- W1997659326 cites W2089020530 @default.
- W1997659326 cites W2089235909 @default.
- W1997659326 cites W2091184393 @default.
- W1997659326 cites W2092434879 @default.
- W1997659326 cites W2093503106 @default.
- W1997659326 cites W2101503464 @default.
- W1997659326 cites W2109429221 @default.
- W1997659326 cites W2114419812 @default.
- W1997659326 cites W2114648247 @default.
- W1997659326 cites W2134998619 @default.
- W1997659326 cites W2145485643 @default.
- W1997659326 doi "https://doi.org/10.1063/1.2437667" @default.
- W1997659326 hasPublicationYear "2007" @default.
- W1997659326 type Work @default.
- W1997659326 sameAs 1997659326 @default.
- W1997659326 citedByCount "44" @default.
- W1997659326 countsByYear W19976593262012 @default.
- W1997659326 countsByYear W19976593262013 @default.
- W1997659326 countsByYear W19976593262014 @default.
- W1997659326 countsByYear W19976593262015 @default.
- W1997659326 countsByYear W19976593262016 @default.
- W1997659326 countsByYear W19976593262017 @default.
- W1997659326 countsByYear W19976593262018 @default.
- W1997659326 countsByYear W19976593262019 @default.
- W1997659326 countsByYear W19976593262020 @default.
- W1997659326 countsByYear W19976593262022 @default.
- W1997659326 crossrefType "journal-article" @default.
- W1997659326 hasAuthorship W1997659326A5014828257 @default.
- W1997659326 hasAuthorship W1997659326A5024673666 @default.
- W1997659326 hasAuthorship W1997659326A5081644511 @default.
- W1997659326 hasAuthorship W1997659326A5082118838 @default.
- W1997659326 hasBestOaLocation W19976593261 @default.
- W1997659326 hasConcept C100460472 @default.
- W1997659326 hasConcept C109486029 @default.
- W1997659326 hasConcept C121332964 @default.
- W1997659326 hasConcept C1291036 @default.
- W1997659326 hasConcept C136525101 @default.
- W1997659326 hasConcept C142724271 @default.
- W1997659326 hasConcept C146088050 @default.
- W1997659326 hasConcept C147120987 @default.
- W1997659326 hasConcept C151730666 @default.
- W1997659326 hasConcept C159985019 @default.
- W1997659326 hasConcept C162117346 @default.
- W1997659326 hasConcept C171250308 @default.
- W1997659326 hasConcept C186187911 @default.
- W1997659326 hasConcept C191897082 @default.
- W1997659326 hasConcept C192562407 @default.
- W1997659326 hasConcept C193016168 @default.
- W1997659326 hasConcept C200274948 @default.