FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1997670617> ?p ?o ?g. }

• W1997670617 abstract "Line integrated electron densities are measured by 160.28 GHz Gaussian beam microwave interferometry in a 10 Hz pulsed (50% duty cycle) cc-rf oxygen discharge, operating at 13.56 MHz. Depending on the processing parameters, the oxygen rf discharge displays two different operation modes regarding its electronegativity. For higher rf power with negative self-bias voltage above −220 V, the oxygen discharge acts as electropositive plasma (n-/ne≪1), whereas at lower rf power and self-bias voltage the plasma becomes strongly electronegative (n-/ne&gt;2). In the latter mode, a significant electron density increase is measured in the early afterglow (&lt;100 μs) within a pressure range from 20 to 100 Pa. By use of a simple rate equation model, the temporal behavior of the electron density could be reproduced for both modes of electronegativity. The electron production in the early afterglow is mainly caused due to the detachment of negative atomic oxygen ions by metastable oxygen molecules." @default.
• W1997670617 created "2016-06-24" @default.
• W1997670617 creator A5006729408 @default.
• W1997670617 creator A5013556811 @default.
• W1997670617 creator A5037594466 @default.
• W1997670617 date "2012-07-01" @default.
• W1997670617 modified "2023-09-27" @default.
• W1997670617 title "Detachment-induced electron production in the early afterglow of pulsed cc-rf oxygen plasmas" @default.
• W1997670617 cites W1964989868 @default.
• W1997670617 cites W1971364569 @default.
• W1997670617 cites W1979226454 @default.
• W1997670617 cites W1979866726 @default.
• W1997670617 cites W1982879116 @default.
• W1997670617 cites W1985169809 @default.
• W1997670617 cites W1993361798 @default.
• W1997670617 cites W1998630075 @default.
• W1997670617 cites W2000814880 @default.
• W1997670617 cites W2007765410 @default.
• W1997670617 cites W2008846217 @default.
• W1997670617 cites W2009432923 @default.
• W1997670617 cites W2009539955 @default.
• W1997670617 cites W2013506474 @default.
• W1997670617 cites W2014946905 @default.
• W1997670617 cites W2018368287 @default.
• W1997670617 cites W2026104038 @default.
• W1997670617 cites W2050537085 @default.
• W1997670617 cites W2059168091 @default.
• W1997670617 cites W2060527760 @default.
• W1997670617 cites W2065398634 @default.
• W1997670617 cites W2068674765 @default.
• W1997670617 cites W2069863240 @default.
• W1997670617 cites W2072515540 @default.
• W1997670617 cites W2084041910 @default.
• W1997670617 cites W2091057605 @default.
• W1997670617 cites W2094048305 @default.
• W1997670617 cites W2124550796 @default.
• W1997670617 cites W2131446005 @default.
• W1997670617 cites W2153131814 @default.
• W1997670617 cites W2156230670 @default.
• W1997670617 doi "https://doi.org/10.1063/1.4737196" @default.
• W1997670617 hasPublicationYear "2012" @default.
• W1997670617 type Work @default.
• W1997670617 sameAs 1997670617 @default.
• W1997670617 citedByCount "15" @default.
• W1997670617 countsByYear W19976706172012 @default.
• W1997670617 countsByYear W19976706172013 @default.
• W1997670617 countsByYear W19976706172014 @default.
• W1997670617 countsByYear W19976706172015 @default.
• W1997670617 countsByYear W19976706172017 @default.
• W1997670617 countsByYear W19976706172018 @default.
• W1997670617 countsByYear W19976706172019 @default.
• W1997670617 countsByYear W19976706172020 @default.
• W1997670617 countsByYear W19976706172021 @default.
• W1997670617 crossrefType "journal-article" @default.
• W1997670617 hasAuthorship W1997670617A5006729408 @default.
• W1997670617 hasAuthorship W1997670617A5013556811 @default.
• W1997670617 hasAuthorship W1997670617A5037594466 @default.
• W1997670617 hasConcept C121332964 @default.
• W1997670617 hasConcept C125485243 @default.
• W1997670617 hasConcept C1276947 @default.
• W1997670617 hasConcept C145148216 @default.
• W1997670617 hasConcept C147120987 @default.
• W1997670617 hasConcept C17599544 @default.
• W1997670617 hasConcept C177293861 @default.
• W1997670617 hasConcept C184779094 @default.
• W1997670617 hasConcept C22175881 @default.
• W1997670617 hasConcept C2777036043 @default.
• W1997670617 hasConcept C540031477 @default.
• W1997670617 hasConcept C62520636 @default.
• W1997670617 hasConcept C82706917 @default.
• W1997670617 hasConcept C89464430 @default.
• W1997670617 hasConceptScore W1997670617C121332964 @default.
• W1997670617 hasConceptScore W1997670617C125485243 @default.
• W1997670617 hasConceptScore W1997670617C1276947 @default.
• W1997670617 hasConceptScore W1997670617C145148216 @default.
• W1997670617 hasConceptScore W1997670617C147120987 @default.
• W1997670617 hasConceptScore W1997670617C17599544 @default.
• W1997670617 hasConceptScore W1997670617C177293861 @default.
• W1997670617 hasConceptScore W1997670617C184779094 @default.
• W1997670617 hasConceptScore W1997670617C22175881 @default.
• W1997670617 hasConceptScore W1997670617C2777036043 @default.
• W1997670617 hasConceptScore W1997670617C540031477 @default.
• W1997670617 hasConceptScore W1997670617C62520636 @default.
• W1997670617 hasConceptScore W1997670617C82706917 @default.
• W1997670617 hasConceptScore W1997670617C89464430 @default.
• W1997670617 hasIssue "7" @default.
• W1997670617 hasLocation W19976706171 @default.
• W1997670617 hasOpenAccess W1997670617 @default.
• W1997670617 hasPrimaryLocation W19976706171 @default.
• W1997670617 hasRelatedWork W1965131386 @default.
• W1997670617 hasRelatedWork W2048189949 @default.
• W1997670617 hasRelatedWork W2056990649 @default.
• W1997670617 hasRelatedWork W2060031862 @default.
• W1997670617 hasRelatedWork W2091949762 @default.
• W1997670617 hasRelatedWork W2105669254 @default.
• W1997670617 hasRelatedWork W2153645678 @default.
• W1997670617 hasRelatedWork W2334966132 @default.
• W1997670617 hasRelatedWork W2564767379 @default.
• W1997670617 hasRelatedWork W2019437472 @default.
• W1997670617 hasVolume "19" @default.

• next