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- W1997741346 abstract "We propose a sampling method to measure surface roughness of circular flat in this paper. The steps of this method are described in following. First, the number of sampling points is determined based on the radius of the circular flat; then the sampling points are selected by a certain angle in helical line; at last we use instrument like white light interferometer to measure the surface roughness of these sample points. The sampling method can effectively use the surface roughness of sampling points to estimate the surface roughness of the overall optical surface. According to mathematic derivation and simulation analysis, this method has a good sampling results, thus it can be widely used to measure the surface roughness of the circular flat." @default.
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- W1997741346 date "2014-09-18" @default.
- W1997741346 modified "2023-09-23" @default.
- W1997741346 title "A sampling method to measure surface roughness of circular flat" @default.
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- W1997741346 doi "https://doi.org/10.1117/12.2073329" @default.
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