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- W1997810946 abstract "The effects of different substrate-carrier arrangements and operation conditions on the productivity and coating homogeneity of typical industrial physical vapour deposition (PVD) batch arrangements are analysed theoretically. The arrangement and operation conditions considered include: different numbers of satellites on a threefold substrate-rotation system, different ratios of the base- and the satellite-rotation frequencies, and different starting positions of the substrate face. The number of satellites was shown to be important to the substrate capacity of the batch charge and the ratio of the two rotation frequencies was shown to determine the beating behaviour of the growth-rate oscillations on the rotating substrates." @default.
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- W1997810946 date "1999-09-01" @default.
- W1997810946 modified "2023-10-01" @default.
- W1997810946 title "Substrate-rotation systems and productivity of industrial PVD processes" @default.
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- W1997810946 doi "https://doi.org/10.1016/s0257-8972(99)00120-6" @default.
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