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- W1997816086 abstract "In this paper, nanocrystalline diamond films had been synthesized by near surface glow discharge chemical vapor deposition on single-crystalline (100) silicon substrates when methane and hydrogen acted as input gases. The characters of the diamond films had been identified by scanning electron microscopy (SEM), Raman Spectrum and X-ray diffraction (XRD). The analytic results show that the high quality nanocrystalline diamond film of (111) orientation had been deposited on single-crystalline (100) silicon substrate at temperature of approximately 850°C. Simultaneously, the studies of the influence of gas pressure and CH<sub>4</sub> concentration in feeding gas on the diamond growth were made." @default.
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- W1997816086 date "2002-09-18" @default.
- W1997816086 modified "2023-09-23" @default.
- W1997816086 title "Synthesis of thin diamond films on Si substrate by the means of near surface glow discharge CVD" @default.
- W1997816086 doi "https://doi.org/10.1117/12.465648" @default.
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