Matches in SemOpenAlex for { <https://semopenalex.org/work/W1997938020> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W1997938020 abstract "Abstract In this paper, plasma parameters of a DC unbalanced planar magnetron applied for Mo/C : H composite film deposition are described in connection with the basic film properties. Langmuir probe (of a V shape) heated to a dark red was used for V–A characteristic measurements in Ar and in a mixture of Ar and n-hexane as working gases. Floating and plasma potentials, electron temperature and concentrations were measured. Using a cold plane Langmuir electrostatic probe in the form of a small disc the radial distribution of a plasma potential and saturated ion current to the probe were determined. Using a thermocouple probe spot welded to the disc probe a heat load in the substrate plane was investigated. Also the dependence of the floating potential on pressure of the working gas and substrate temperature on the power delivered to the discharge were found. Finally, radial distribution of the composite film resistance per square and film thickness were measured and are discussed in connection with the measured plasma parameters." @default.
- W1997938020 created "2016-06-24" @default.
- W1997938020 creator A5045359292 @default.
- W1997938020 creator A5057480773 @default.
- W1997938020 creator A5072041742 @default.
- W1997938020 creator A5085292344 @default.
- W1997938020 date "1999-04-01" @default.
- W1997938020 modified "2023-09-26" @default.
- W1997938020 title "Characterization of an unbalanced magnetron for composite film (metal/C:H) deposition" @default.
- W1997938020 doi "https://doi.org/10.1016/s0042-207x(98)00324-8" @default.
- W1997938020 hasPublicationYear "1999" @default.
- W1997938020 type Work @default.
- W1997938020 sameAs 1997938020 @default.
- W1997938020 citedByCount "3" @default.
- W1997938020 crossrefType "journal-article" @default.
- W1997938020 hasAuthorship W1997938020A5045359292 @default.
- W1997938020 hasAuthorship W1997938020A5057480773 @default.
- W1997938020 hasAuthorship W1997938020A5072041742 @default.
- W1997938020 hasAuthorship W1997938020A5085292344 @default.
- W1997938020 hasConcept C104779481 @default.
- W1997938020 hasConcept C111368507 @default.
- W1997938020 hasConcept C113196181 @default.
- W1997938020 hasConcept C121332964 @default.
- W1997938020 hasConcept C123408415 @default.
- W1997938020 hasConcept C127313418 @default.
- W1997938020 hasConcept C145148216 @default.
- W1997938020 hasConcept C159985019 @default.
- W1997938020 hasConcept C168068576 @default.
- W1997938020 hasConcept C171250308 @default.
- W1997938020 hasConcept C176118016 @default.
- W1997938020 hasConcept C178790620 @default.
- W1997938020 hasConcept C184779094 @default.
- W1997938020 hasConcept C185592680 @default.
- W1997938020 hasConcept C19067145 @default.
- W1997938020 hasConcept C192039680 @default.
- W1997938020 hasConcept C192562407 @default.
- W1997938020 hasConcept C22423302 @default.
- W1997938020 hasConcept C2777289219 @default.
- W1997938020 hasConcept C43503373 @default.
- W1997938020 hasConcept C43617362 @default.
- W1997938020 hasConcept C61427134 @default.
- W1997938020 hasConcept C62520636 @default.
- W1997938020 hasConcept C82706917 @default.
- W1997938020 hasConceptScore W1997938020C104779481 @default.
- W1997938020 hasConceptScore W1997938020C111368507 @default.
- W1997938020 hasConceptScore W1997938020C113196181 @default.
- W1997938020 hasConceptScore W1997938020C121332964 @default.
- W1997938020 hasConceptScore W1997938020C123408415 @default.
- W1997938020 hasConceptScore W1997938020C127313418 @default.
- W1997938020 hasConceptScore W1997938020C145148216 @default.
- W1997938020 hasConceptScore W1997938020C159985019 @default.
- W1997938020 hasConceptScore W1997938020C168068576 @default.
- W1997938020 hasConceptScore W1997938020C171250308 @default.
- W1997938020 hasConceptScore W1997938020C176118016 @default.
- W1997938020 hasConceptScore W1997938020C178790620 @default.
- W1997938020 hasConceptScore W1997938020C184779094 @default.
- W1997938020 hasConceptScore W1997938020C185592680 @default.
- W1997938020 hasConceptScore W1997938020C19067145 @default.
- W1997938020 hasConceptScore W1997938020C192039680 @default.
- W1997938020 hasConceptScore W1997938020C192562407 @default.
- W1997938020 hasConceptScore W1997938020C22423302 @default.
- W1997938020 hasConceptScore W1997938020C2777289219 @default.
- W1997938020 hasConceptScore W1997938020C43503373 @default.
- W1997938020 hasConceptScore W1997938020C43617362 @default.
- W1997938020 hasConceptScore W1997938020C61427134 @default.
- W1997938020 hasConceptScore W1997938020C62520636 @default.
- W1997938020 hasConceptScore W1997938020C82706917 @default.
- W1997938020 hasLocation W19979380201 @default.
- W1997938020 hasOpenAccess W1997938020 @default.
- W1997938020 hasPrimaryLocation W19979380201 @default.
- W1997938020 hasRelatedWork W1979035914 @default.
- W1997938020 hasRelatedWork W1981747440 @default.
- W1997938020 hasRelatedWork W2002152113 @default.
- W1997938020 hasRelatedWork W2008755052 @default.
- W1997938020 hasRelatedWork W2010357066 @default.
- W1997938020 hasRelatedWork W2020934406 @default.
- W1997938020 hasRelatedWork W2021266093 @default.
- W1997938020 hasRelatedWork W2030466288 @default.
- W1997938020 hasRelatedWork W2038962971 @default.
- W1997938020 hasRelatedWork W2050071788 @default.
- W1997938020 hasRelatedWork W2052590007 @default.
- W1997938020 hasRelatedWork W2057071168 @default.
- W1997938020 hasRelatedWork W2074847140 @default.
- W1997938020 hasRelatedWork W2083479783 @default.
- W1997938020 hasRelatedWork W2086042610 @default.
- W1997938020 hasRelatedWork W2087924985 @default.
- W1997938020 hasRelatedWork W2091433980 @default.
- W1997938020 hasRelatedWork W2093774430 @default.
- W1997938020 hasRelatedWork W2121129645 @default.
- W1997938020 hasRelatedWork W2588884352 @default.
- W1997938020 isParatext "false" @default.
- W1997938020 isRetracted "false" @default.
- W1997938020 magId "1997938020" @default.
- W1997938020 workType "article" @default.