Matches in SemOpenAlex for { <https://semopenalex.org/work/W1997994703> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W1997994703 endingPage "2423" @default.
- W1997994703 startingPage "2416" @default.
- W1997994703 abstract "The dopant profiles that result at the end of prebake are given in analytical form for both diffused (buried layer) and nondiffused regions. Because of the position dependence of the profile in the nondiffused region, a transport model is developed. The model is shown to describe the experimental results reported in the literature quite well both with respect to position and carrier gas velocity. The dopant profiles at the end of prebake, in turn, are used to obtain analytical solutions for the dopant redistribution in the course of epitaxial deposition following the prebake. The results obtained for both diffused and nondiffused regions in the presence of dopant in gas during the epitaxial deposition lead to relatively simple expressions for the final dopant profiles. A relatively simple expression for the final maximum lateral autodoping level is also given. A rather complete description of the dopant redistribution in the course of prebake and subsequent epitaxial deposition presented here should allow one to determine exactly how a change in any operating condition affects the final profiles, thereby enabling one to manipulate the operating conditions for the desired dopant profiles." @default.
- W1997994703 created "2016-06-24" @default.
- W1997994703 creator A5022762808 @default.
- W1997994703 date "1986-11-01" @default.
- W1997994703 modified "2023-09-27" @default.
- W1997994703 title "Dopant Redistribution During Prebake and Epitaxial Deposition" @default.
- W1997994703 doi "https://doi.org/10.1149/1.2108419" @default.
- W1997994703 hasPublicationYear "1986" @default.
- W1997994703 type Work @default.
- W1997994703 sameAs 1997994703 @default.
- W1997994703 citedByCount "0" @default.
- W1997994703 crossrefType "journal-article" @default.
- W1997994703 hasAuthorship W1997994703A5022762808 @default.
- W1997994703 hasConcept C110738630 @default.
- W1997994703 hasConcept C127313418 @default.
- W1997994703 hasConcept C151730666 @default.
- W1997994703 hasConcept C171250308 @default.
- W1997994703 hasConcept C17744445 @default.
- W1997994703 hasConcept C185592680 @default.
- W1997994703 hasConcept C191952053 @default.
- W1997994703 hasConcept C192562407 @default.
- W1997994703 hasConcept C199539241 @default.
- W1997994703 hasConcept C2779227376 @default.
- W1997994703 hasConcept C2816523 @default.
- W1997994703 hasConcept C49040817 @default.
- W1997994703 hasConcept C57863236 @default.
- W1997994703 hasConcept C64297162 @default.
- W1997994703 hasConcept C74080474 @default.
- W1997994703 hasConcept C94625758 @default.
- W1997994703 hasConceptScore W1997994703C110738630 @default.
- W1997994703 hasConceptScore W1997994703C127313418 @default.
- W1997994703 hasConceptScore W1997994703C151730666 @default.
- W1997994703 hasConceptScore W1997994703C171250308 @default.
- W1997994703 hasConceptScore W1997994703C17744445 @default.
- W1997994703 hasConceptScore W1997994703C185592680 @default.
- W1997994703 hasConceptScore W1997994703C191952053 @default.
- W1997994703 hasConceptScore W1997994703C192562407 @default.
- W1997994703 hasConceptScore W1997994703C199539241 @default.
- W1997994703 hasConceptScore W1997994703C2779227376 @default.
- W1997994703 hasConceptScore W1997994703C2816523 @default.
- W1997994703 hasConceptScore W1997994703C49040817 @default.
- W1997994703 hasConceptScore W1997994703C57863236 @default.
- W1997994703 hasConceptScore W1997994703C64297162 @default.
- W1997994703 hasConceptScore W1997994703C74080474 @default.
- W1997994703 hasConceptScore W1997994703C94625758 @default.
- W1997994703 hasIssue "11" @default.
- W1997994703 hasLocation W19979947031 @default.
- W1997994703 hasOpenAccess W1997994703 @default.
- W1997994703 hasPrimaryLocation W19979947031 @default.
- W1997994703 hasRelatedWork W1985037536 @default.
- W1997994703 hasRelatedWork W2003818447 @default.
- W1997994703 hasRelatedWork W2028994635 @default.
- W1997994703 hasRelatedWork W2049419769 @default.
- W1997994703 hasRelatedWork W2050901158 @default.
- W1997994703 hasRelatedWork W2066368107 @default.
- W1997994703 hasRelatedWork W2071453054 @default.
- W1997994703 hasRelatedWork W2354138635 @default.
- W1997994703 hasRelatedWork W3045899165 @default.
- W1997994703 hasRelatedWork W2056327884 @default.
- W1997994703 hasVolume "133" @default.
- W1997994703 isParatext "false" @default.
- W1997994703 isRetracted "false" @default.
- W1997994703 magId "1997994703" @default.
- W1997994703 workType "article" @default.