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- W1997996846 abstract "The time evolution of ablation and material transport during ArF excimer laser induced blow off of tungsten films from glass substrates is studied by fast photography using delayed dye laser pulses. The analysis of experimental results combined with heat flow calculations provides evidence that tungsten removal in the solid phase is the dominant mechanism in the 40 - 200 mJ/cm<SUP>2</SUP> fluence domain, while partially inhomogeneous melting is observed between 200 and 800 mJ/cm<SUP>2</SUP>. In this fluence range, solid fragments and a halo consisting of molten droplets are observed indicating spatial separation of the two phases. The molten phase advances faster, forming a protective mist in front of the solid piece(s). At yet higher fluences (800 - 1000 mJ/cm<SUP>2</SUP>), a well separated solid phase could be recorded under the halo although model calculations suggest full vaporization of the layer. This unexpected phenomenon is explained by the optical shielding effect of the halo." @default.
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- W1997996846 date "1994-09-07" @default.
- W1997996846 modified "2023-09-27" @default.
- W1997996846 title "Dynamics of excimer laser ablation of thin tungsten films studied by fast photography" @default.
- W1997996846 doi "https://doi.org/10.1117/12.184786" @default.
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