Matches in SemOpenAlex for { <https://semopenalex.org/work/W1998008120> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W1998008120 endingPage "79" @default.
- W1998008120 startingPage "75" @default.
- W1998008120 abstract "Abstract The performance of a steered-arc evaporation source is compared to the unbalanced magnetron, as to its performance in the preparation of elemental and reactively produced compound films. Materials investigated include Al, Ti, Cu, TiN, and Al 2 O 3 . In reactive processing the ionised metal constituent provided by arc evaporation appears to make the kinetics of the substrate reaction process much more simple than those required with argon-ion-assisted sputter processes where a careful balance must be maintained. It has been found that in the case of TiN better quality films could be prepared onto room temperature substrates by arc evaporation than by sputtering, while for Al 2 O 3 the arc-deposited films show good adhesion, good optical properties and were nearly stoichiometric with a refractive index of 1.66." @default.
- W1998008120 created "2016-06-24" @default.
- W1998008120 creator A5028473061 @default.
- W1998008120 creator A5062058816 @default.
- W1998008120 date "1998-02-01" @default.
- W1998008120 modified "2023-09-27" @default.
- W1998008120 title "Comparison of unbalanced magnetron sputtering and filtered arc evaporation for the preparation of films onto insulating substrates" @default.
- W1998008120 cites W1970359496 @default.
- W1998008120 cites W2016850843 @default.
- W1998008120 cites W2038023666 @default.
- W1998008120 cites W2070424020 @default.
- W1998008120 cites W2070492069 @default.
- W1998008120 doi "https://doi.org/10.1016/s0042-207x(97)00011-0" @default.
- W1998008120 hasPublicationYear "1998" @default.
- W1998008120 type Work @default.
- W1998008120 sameAs 1998008120 @default.
- W1998008120 citedByCount "5" @default.
- W1998008120 countsByYear W19980081202013 @default.
- W1998008120 crossrefType "journal-article" @default.
- W1998008120 hasAuthorship W1998008120A5028473061 @default.
- W1998008120 hasAuthorship W1998008120A5062058816 @default.
- W1998008120 hasConcept C113196181 @default.
- W1998008120 hasConcept C121332964 @default.
- W1998008120 hasConcept C123408415 @default.
- W1998008120 hasConcept C153294291 @default.
- W1998008120 hasConcept C171250308 @default.
- W1998008120 hasConcept C185592680 @default.
- W1998008120 hasConcept C19067145 @default.
- W1998008120 hasConcept C192562407 @default.
- W1998008120 hasConcept C22423302 @default.
- W1998008120 hasConcept C2524010 @default.
- W1998008120 hasConcept C2779192298 @default.
- W1998008120 hasConcept C33923547 @default.
- W1998008120 hasConcept C43617362 @default.
- W1998008120 hasConcept C49040817 @default.
- W1998008120 hasConcept C61427134 @default.
- W1998008120 hasConcept C61441594 @default.
- W1998008120 hasConcept C83415579 @default.
- W1998008120 hasConcept C97892325 @default.
- W1998008120 hasConceptScore W1998008120C113196181 @default.
- W1998008120 hasConceptScore W1998008120C121332964 @default.
- W1998008120 hasConceptScore W1998008120C123408415 @default.
- W1998008120 hasConceptScore W1998008120C153294291 @default.
- W1998008120 hasConceptScore W1998008120C171250308 @default.
- W1998008120 hasConceptScore W1998008120C185592680 @default.
- W1998008120 hasConceptScore W1998008120C19067145 @default.
- W1998008120 hasConceptScore W1998008120C192562407 @default.
- W1998008120 hasConceptScore W1998008120C22423302 @default.
- W1998008120 hasConceptScore W1998008120C2524010 @default.
- W1998008120 hasConceptScore W1998008120C2779192298 @default.
- W1998008120 hasConceptScore W1998008120C33923547 @default.
- W1998008120 hasConceptScore W1998008120C43617362 @default.
- W1998008120 hasConceptScore W1998008120C49040817 @default.
- W1998008120 hasConceptScore W1998008120C61427134 @default.
- W1998008120 hasConceptScore W1998008120C61441594 @default.
- W1998008120 hasConceptScore W1998008120C83415579 @default.
- W1998008120 hasConceptScore W1998008120C97892325 @default.
- W1998008120 hasIssue "2" @default.
- W1998008120 hasLocation W19980081201 @default.
- W1998008120 hasOpenAccess W1998008120 @default.
- W1998008120 hasPrimaryLocation W19980081201 @default.
- W1998008120 hasRelatedWork W192053364 @default.
- W1998008120 hasRelatedWork W2022760403 @default.
- W1998008120 hasRelatedWork W2057587971 @default.
- W1998008120 hasRelatedWork W2062459093 @default.
- W1998008120 hasRelatedWork W2183996253 @default.
- W1998008120 hasRelatedWork W2938213029 @default.
- W1998008120 hasRelatedWork W3199181436 @default.
- W1998008120 hasRelatedWork W3209277451 @default.
- W1998008120 hasRelatedWork W591433090 @default.
- W1998008120 hasRelatedWork W1953198208 @default.
- W1998008120 hasVolume "49" @default.
- W1998008120 isParatext "false" @default.
- W1998008120 isRetracted "false" @default.
- W1998008120 magId "1998008120" @default.
- W1998008120 workType "article" @default.