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- W1998044408 endingPage "323" @default.
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- W1998044408 abstract "Abstract The deposition of metal silicide thin films can be undertaken using volatile organometallic complexes. Organometallic vapor phase epitaxy or metal-organic chemical vapor phase epitaxy has a number of potential advantages over conventional chemical vapor deposition and molecular beam epitaxy technologies, and a number of novel thin film materials may be made from organometallic compounds. Plasma-, pyrolytic- and photolytic- assisted decomposition of organometallic complexes have been undertaken in an effort to make a variety of metallic and metal silicide thin films. These efforts are comprehensively reviewed." @default.
- W1998044408 created "2016-06-24" @default.
- W1998044408 creator A5032354805 @default.
- W1998044408 creator A5061665191 @default.
- W1998044408 creator A5067655827 @default.
- W1998044408 date "1989-04-01" @default.
- W1998044408 modified "2023-10-16" @default.
- W1998044408 title "Deposition of thin metal and metal silicide films from the decomposition of organometallic compounds" @default.
- W1998044408 cites W1559924278 @default.
- W1998044408 cites W1571761090 @default.
- W1998044408 cites W1631671328 @default.
- W1998044408 cites W1820307015 @default.
- W1998044408 cites W1892088982 @default.
- W1998044408 cites W1963502863 @default.
- W1998044408 cites W1964055501 @default.
- W1998044408 cites W1964415744 @default.
- W1998044408 cites W1964702167 @default.
- W1998044408 cites W1965349151 @default.
- W1998044408 cites W1965688995 @default.
- W1998044408 cites W1965719259 @default.
- W1998044408 cites W1965873390 @default.
- W1998044408 cites W1966343571 @default.
- W1998044408 cites W1966688119 @default.
- W1998044408 cites W1967043372 @default.
- W1998044408 cites W1967327708 @default.
- W1998044408 cites W1968955201 @default.
- W1998044408 cites W1971498627 @default.
- W1998044408 cites W1971509025 @default.
- W1998044408 cites W1972589749 @default.
- W1998044408 cites W1972670983 @default.
- W1998044408 cites W1972932773 @default.
- W1998044408 cites W1973384289 @default.
- W1998044408 cites W1973600107 @default.
- W1998044408 cites W1975572935 @default.
- W1998044408 cites W1975747780 @default.
- W1998044408 cites W1976062300 @default.
- W1998044408 cites W1976345774 @default.
- W1998044408 cites W1977137400 @default.
- W1998044408 cites W1977290970 @default.
- W1998044408 cites W1977874574 @default.
- W1998044408 cites W1979058536 @default.
- W1998044408 cites W1979575011 @default.
- W1998044408 cites W1979988801 @default.
- W1998044408 cites W1980153544 @default.
- W1998044408 cites W1980243491 @default.
- W1998044408 cites W1980378632 @default.
- W1998044408 cites W1980426092 @default.
- W1998044408 cites W1980471807 @default.
- W1998044408 cites W1982527217 @default.
- W1998044408 cites W1982620004 @default.
- W1998044408 cites W1983683856 @default.
- W1998044408 cites W1984444863 @default.
- W1998044408 cites W1984827187 @default.
- W1998044408 cites W1985006237 @default.
- W1998044408 cites W1985071064 @default.
- W1998044408 cites W1985345716 @default.
- W1998044408 cites W1985520663 @default.
- W1998044408 cites W1986025179 @default.
- W1998044408 cites W1986643085 @default.
- W1998044408 cites W1988156665 @default.
- W1998044408 cites W1988161311 @default.
- W1998044408 cites W1988344697 @default.
- W1998044408 cites W1988501618 @default.
- W1998044408 cites W1988546863 @default.
- W1998044408 cites W1989193416 @default.
- W1998044408 cites W1990075594 @default.
- W1998044408 cites W1991071773 @default.
- W1998044408 cites W1991566459 @default.
- W1998044408 cites W1991635881 @default.
- W1998044408 cites W1991900595 @default.
- W1998044408 cites W1992224842 @default.
- W1998044408 cites W1992339397 @default.
- W1998044408 cites W1992530870 @default.
- W1998044408 cites W1993360735 @default.
- W1998044408 cites W1993451624 @default.
- W1998044408 cites W1993713876 @default.
- W1998044408 cites W1994092845 @default.
- W1998044408 cites W1994581831 @default.
- W1998044408 cites W1995936154 @default.
- W1998044408 cites W1996013382 @default.
- W1998044408 cites W1996227152 @default.
- W1998044408 cites W1996639903 @default.
- W1998044408 cites W1997181306 @default.
- W1998044408 cites W1997271194 @default.
- W1998044408 cites W1998548533 @default.
- W1998044408 cites W1998711683 @default.
- W1998044408 cites W1999293746 @default.
- W1998044408 cites W1999365201 @default.
- W1998044408 cites W1999583616 @default.
- W1998044408 cites W2001464220 @default.
- W1998044408 cites W2001652145 @default.
- W1998044408 cites W2002700749 @default.
- W1998044408 cites W2002829001 @default.
- W1998044408 cites W2004485839 @default.
- W1998044408 cites W2004557310 @default.
- W1998044408 cites W2005606282 @default.
- W1998044408 cites W2005827598 @default.
- W1998044408 cites W2006920899 @default.