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- W1998089055 abstract "Abstract This paper presents the methods of fabricating narrow parallel submicrometric stripes in silicon dioxide and a resist layer. The experiments were conducted by two techniques: double patterning lithography and double exposure lithography. In addition to the above mentioned processes, mask translation was applied. For all conducted experiments, chrome masks and a 405 nm line of the high pressure mercury lamp of an MA-56 Mask Aligner System were used. The main aim of the performed tests was to establish the utility and the possible applications of the methods used." @default.
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- W1998089055 date "2013-01-01" @default.
- W1998089055 modified "2023-09-27" @default.
- W1998089055 title "The new method of fabrication of submicron structures by optical lithography with mask shifting and mask rotation" @default.
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- W1998089055 doi "https://doi.org/10.2478/s11534-012-0166-0" @default.
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