FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1998276072> ?p ?o ?g. }

• W1998276072 abstract "Microwave enhancement of magnetically confined discharges is shown to produce significant increases in etch rates of III-V semiconductors and in the emission intensity from the active species over conventional radio-frequency (RF) plasmas. These electron cyclotron resonance (ECR) discharges require some alteration of the gas chemistries commonly used for reactive ion etching, especially polymer-forming chemistries, and generally perform best using pure gases. Additional RF-biasing of the sample position is used to obtain practical etch rates, and the requisite anisotropy and the source-sample distance must be minimized to preserve the high active species density produced in the microwave discharge." @default.
• W1998276072 created "2016-06-24" @default.
• W1998276072 creator A5015824782 @default.
• W1998276072 creator A5020967437 @default.
• W1998276072 creator A5068212478 @default.
• W1998276072 creator A5085381025 @default.
• W1998276072 date "1993-10-01" @default.
• W1998276072 modified "2023-09-26" @default.
• W1998276072 title "Optical emission spectroscopy of electron cyclotron resonance discharges for III-V semiconductor processing" @default.
• W1998276072 cites W1220414608 @default.
• W1998276072 cites W1970749931 @default.
• W1998276072 cites W1992164015 @default.
• W1998276072 cites W1992973307 @default.
• W1998276072 cites W1996768707 @default.
• W1998276072 cites W2003990790 @default.
• W1998276072 cites W2005064165 @default.
• W1998276072 cites W2007705225 @default.
• W1998276072 cites W2008129441 @default.
• W1998276072 cites W2019014084 @default.
• W1998276072 cites W2019052097 @default.
• W1998276072 cites W2025393487 @default.
• W1998276072 cites W2026016138 @default.
• W1998276072 cites W2036911523 @default.
• W1998276072 cites W2050319692 @default.
• W1998276072 cites W2050484241 @default.
• W1998276072 cites W2057950877 @default.
• W1998276072 cites W2060642436 @default.
• W1998276072 cites W2063954354 @default.
• W1998276072 cites W2066964097 @default.
• W1998276072 cites W2068437295 @default.
• W1998276072 cites W2070874192 @default.
• W1998276072 cites W2075930272 @default.
• W1998276072 cites W2076649833 @default.
• W1998276072 cites W2079699715 @default.
• W1998276072 cites W2080486149 @default.
• W1998276072 cites W2094058546 @default.
• W1998276072 cites W2117617909 @default.
• W1998276072 cites W2131643037 @default.
• W1998276072 cites W2164078591 @default.
• W1998276072 cites W2226913695 @default.
• W1998276072 cites W2010741228 @default.
• W1998276072 cites W2156436431 @default.
• W1998276072 doi "https://doi.org/10.1088/0268-1242/8/10/018" @default.
• W1998276072 hasPublicationYear "1993" @default.
• W1998276072 type Work @default.
• W1998276072 sameAs 1998276072 @default.
• W1998276072 citedByCount "8" @default.
• W1998276072 countsByYear W19982760722012 @default.
• W1998276072 crossrefType "journal-article" @default.
• W1998276072 hasAuthorship W1998276072A5015824782 @default.
• W1998276072 hasAuthorship W1998276072A5020967437 @default.
• W1998276072 hasAuthorship W1998276072A5068212478 @default.
• W1998276072 hasAuthorship W1998276072A5085381025 @default.
• W1998276072 hasConcept C100460472 @default.
• W1998276072 hasConcept C108225325 @default.
• W1998276072 hasConcept C113196181 @default.
• W1998276072 hasConcept C120665830 @default.
• W1998276072 hasConcept C121332964 @default.
• W1998276072 hasConcept C130472188 @default.
• W1998276072 hasConcept C132427895 @default.
• W1998276072 hasConcept C145148216 @default.
• W1998276072 hasConcept C147120987 @default.
• W1998276072 hasConcept C175361016 @default.
• W1998276072 hasConcept C178790620 @default.
• W1998276072 hasConcept C184779094 @default.
• W1998276072 hasConcept C185592680 @default.
• W1998276072 hasConcept C192562407 @default.
• W1998276072 hasConcept C193055867 @default.
• W1998276072 hasConcept C2779227376 @default.
• W1998276072 hasConcept C39527238 @default.
• W1998276072 hasConcept C43617362 @default.
• W1998276072 hasConcept C44838205 @default.
• W1998276072 hasConcept C49040817 @default.
• W1998276072 hasConcept C62520636 @default.
• W1998276072 hasConcept C82706917 @default.
• W1998276072 hasConcept C85725439 @default.
• W1998276072 hasConceptScore W1998276072C100460472 @default.
• W1998276072 hasConceptScore W1998276072C108225325 @default.
• W1998276072 hasConceptScore W1998276072C113196181 @default.
• W1998276072 hasConceptScore W1998276072C120665830 @default.
• W1998276072 hasConceptScore W1998276072C121332964 @default.
• W1998276072 hasConceptScore W1998276072C130472188 @default.
• W1998276072 hasConceptScore W1998276072C132427895 @default.
• W1998276072 hasConceptScore W1998276072C145148216 @default.
• W1998276072 hasConceptScore W1998276072C147120987 @default.
• W1998276072 hasConceptScore W1998276072C175361016 @default.
• W1998276072 hasConceptScore W1998276072C178790620 @default.
• W1998276072 hasConceptScore W1998276072C184779094 @default.
• W1998276072 hasConceptScore W1998276072C185592680 @default.
• W1998276072 hasConceptScore W1998276072C192562407 @default.
• W1998276072 hasConceptScore W1998276072C193055867 @default.
• W1998276072 hasConceptScore W1998276072C2779227376 @default.
• W1998276072 hasConceptScore W1998276072C39527238 @default.
• W1998276072 hasConceptScore W1998276072C43617362 @default.
• W1998276072 hasConceptScore W1998276072C44838205 @default.
• W1998276072 hasConceptScore W1998276072C49040817 @default.
• W1998276072 hasConceptScore W1998276072C62520636 @default.
• W1998276072 hasConceptScore W1998276072C82706917 @default.
• W1998276072 hasConceptScore W1998276072C85725439 @default.
• W1998276072 hasLocation W19982760721 @default.

• next