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- W1998368695 abstract "A novel suspended ceramic hot-plate and wire-free bonding interconnection was investigated. The device was made on the popular alumina ceramic flakes with a platinum heater prepared by lift-off process. The structure of suspended beam was machined by laser micromachining technique. This contribution presents first results for single-layer’s ceramic hot-plates that include design, manufacturing and tests of such devices. The results show that the ceramic hot-plate has lower power consumption (280 mW at 400 °C) than classical ceramic gas sensors. Moreover, it has less expensive manufacturing and bonding process than Si manufacturing technology. Low power consumption and good performance at high working temperature (600 °C or more) makes it possibly to be used in some specific applications for gas sensors." @default.
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- W1998368695 date "2011-04-01" @default.
- W1998368695 modified "2023-09-25" @default.
- W1998368695 title "A Micro-Machined Ceramic Hot-Plate for Gas Sensor Applications" @default.
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- W1998368695 doi "https://doi.org/10.4028/www.scientific.net/amr.228-229.558" @default.
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